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Rotary Vane Vacuum Pump for Semiconductor
A rotary vane vacuum pump uses an eccentric rotor and sliding vanes to trap gas in changing-volume chambers.

Product & engineering
Understand the product.
In semiconductor use, the gas stream can carry condensable vapour or reactive by-products. Gas ballast can limit internal condensation, while inlet protection and exhaust treatment address different hazards.
Oil chemistry and contamination influence attainable pressure and servicing intervals. Pump selection therefore includes gas compatibility, backing duty and management of oil mist as well as nominal pumping speed.
What turns activity into demand
A pump suited to clean backing duty may require additional protection for contaminated process exhaust. Count the pump separately from foreline traps, abatement systems and replacement oil.
The commercial boundary
Count the pump separately from foreline traps, abatement systems and replacement oil.
Technical reading
Selected research
Industry Growth & Trends
Global Rotary Vane Vacuum Pump for Semiconductor Industry Growth and Trends Forecast to 2032
Market perspective
The global Rotary Vane Vacuum Pump for Semiconductor market was valued at US$ million in 2026 and is projected to reach US$ million by 2032, implying a CAGR of xx% over 2026-2032.
The North America market for Rotary Vane Vacuum Pump for Semiconductor is projected to increase from US$ million in 2026 to US$ million by 2032, corresponding to a CAGR of % over 2026-2032.
The Europe market for Rotary Vane Vacuum Pump for Semiconductor is projected to increase from US$ million in 2026 to US$ million by 2032, registering a CAGR of % over 2026-2032.
Read the full market overview
The Asia Pacific market for Rotary Vane Vacuum Pump for Semiconductor is projected to increase from US$ million in 2026 to US$ million by 2032, at a CAGR of % over 2026-2032.
Leading global manufacturers of Rotary Vane Vacuum Pump for Semiconductor include Atlas Copco, ULVAC, Pfeiffer Vacuum, Osaka Vacuum, Ltd, Welch (Ingersoll Rand), Becker Pumps Corporation and Zhejiang Value, among others. In 2025, the top three vendors together accounted for approximately % of global revenue.
Report Scope
This report provides a structured, data-driven view of the global Rotary Vane Vacuum Pump for Semiconductor market, combining harmonized quantitative metrics with targeted qualitative insight to support business and growth strategy, market positioning, and capital allocation.
The Rotary Vane Vacuum Pump for Semiconductor market size, estimates, and forecasts are presented in terms of sales volume (k units) and revenue (US$ million), with 2025 as the base year and historical and forecast data for 2021-2032. The report segments the global Rotary Vane Vacuum Pump for Semiconductor market by Type, Application, region/country, and company, provides regional market sizes at the segment level, profiles the competitive landscape and key players and their market ranks, and reviews technology trends and new product developments relevant to Rotary Vane Vacuum Pump for Semiconductor.
Key Companies & Market Share Insights
This section analyzes the strategies and performance of leading manufacturers in the global Rotary Vane Vacuum Pump for Semiconductor market, including portfolio focus, innovation and product development, mergers and acquisitions, collaborations, and geographic expansion used to sustain or enhance competitive positions. It also summarizes recent corporate developments and key financial indicators and provides global revenue, price, and sales volume data by manufacturer for 2020-2025, enabling benchmarking of scale, pricing, and market share and supporting assessment of market concentration through indicators such as CR5 and CR10.
Rotary Vane Vacuum Pump for Semiconductor Market by Company
Atlas Copco
ULVAC
Pfeiffer Vacuum
Osaka Vacuum, Ltd
Welch (Ingersoll Rand)
Becker Pumps Corporation
Zhejiang Value
Rotary Vane Vacuum Pump for Semiconductor Segment by Type
Single-stage Rotary Vane Vacuum Pump
Two-stage Rotary Vane Vacuum Pump
Rotary Vane Vacuum Pump for Semiconductor Segment by Application
Thin Film Deposition
Etching
Cleaning
Crystal Growth
Others
Rotary Vane Vacuum Pump for Semiconductor Segment by Region
North America
United States
Canada
Mexico
Europe
Germany
France
U.K.
Italy
Russia
Spain
Netherlands
Switzerland
Sweden
Poland
Asia-Pacific
China
Japan
South Korea
India
Australia
Taiwan
Southeast Asia
South America
Brazil
Argentina
Chile
Middle East & Africa
Egypt
South Africa
Israel
Türkiye
GCC Countries
Key Drivers & Barriers
High-impact rendering factors and drivers have been studied in this report to aid the readers to understand the general development. Moreover, the report includes restraints and challenges that may act as stumbling blocks on the way of the players. This will assist the users to be attentive and make informed decisions related to business. Specialists have also laid their focus on the upcoming business prospects.
Reasons to Buy This Report
1. This report will help the readers to understand the competition within the industries and strategies for the competitive environment to enhance the potential profit. The report also focuses on the competitive landscape of the global Rotary Vane Vacuum Pump for Semiconductor market, and introduces in detail the market share, industry ranking, competitor ecosystem, market performance, new product development, operation situation, expansion, and acquisition. etc. of the main players, which helps the readers to identify the main competitors and deeply understand the competition pattern of the market.
2. This report will help stakeholders to understand the global industry status and trends of Rotary Vane Vacuum Pump for Semiconductor and provides them with information on key market drivers, restraints, challenges, and opportunities.
3. This report will help stakeholders to understand competitors better and gain more insights to strengthen their position in their businesses. The competitive landscape section includes the market share and rank (in volume and value), competitor ecosystem, new product development, expansion, and acquisition.
4. This report stays updated with novel technology integration, features, and the latest developments in the market.
5. This report helps stakeholders to gain insights into which regions to target globally.
6. This report helps stakeholders to gain insights into the end-user perception concerning the adoption of Rotary Vane Vacuum Pump for Semiconductor.
7. This report helps stakeholders to identify some of the key players in the market and understand their valuable contribution.
Chapter Outline
Chapter 1: Introduces the study scope of this report, executive summary of market segments by type, market size segments for North America, Europe, Asia Pacific, South America, Middle East & Africa.
Chapter 2: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 3: Detailed analysis of Rotary Vane Vacuum Pump for Semiconductor manufacturers competitive landscape, price, sales, revenue, market share and ranking, latest development plan, merger, and acquisition information, etc.
Chapter 4: Sales, revenue of Rotary Vane Vacuum Pump for Semiconductor in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the future development prospects, and market space in the world.
Chapter 5: Introduces market segments by application, market size segment for North America, Europe, Asia Pacific, South America, Middle East & Africa.
Chapter 6: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
Chapter 7, 8, 9, 10 and 11: North America, Europe, Asia Pacific, South America, Middle East & Africa, sales and revenue by country.
Chapter 12: Analysis of industrial chain, key raw materials, manufacturing cost, and market dynamics.
Chapter 13: Concluding Insights of the report.
More report detail
Tables and figures
Scope & coverage.
Types
- Single-stage Rotary Vane Vacuum Pump
- Two-stage Rotary Vane Vacuum Pump
Applications
- Thin Film Deposition
- Etching
- Cleaning
- Crystal Growth
- Others
Companies covered
- Atlas Copco
- ULVAC
- Pfeiffer Vacuum
- Osaka Vacuum, Ltd
- Welch (Ingersoll Rand)
- Becker Pumps Corporation
- Zhejiang Value
Inside the report.
1 Market Overview
- 1.1 Product Definition
- 1.2 Global Market Growth Prospects
- 1.2.1 Global Rotary Vane Vacuum Pump for Semiconductor Market Size Estimates and Forecasts (2021-2032)
- 1.2.2 Global Rotary Vane Vacuum Pump for Semiconductor Sales Estimates and Forecasts (2021-2032)
- 1.3 Rotary Vane Vacuum Pump for Semiconductor Market by Type
- 1.3.1 Single-stage Rotary Vane Vacuum Pump
- 1.3.2 Two-stage Rotary Vane Vacuum Pump
- 1.4 Global Rotary Vane Vacuum Pump for Semiconductor Market Size by Type
- 1.4.1 Global Rotary Vane Vacuum Pump for Semiconductor Market Size Overview by Type (2021-2032)
- 1.4.2 Global Rotary Vane Vacuum Pump for Semiconductor Historic Market Size Review by Type (2021-2026)
- 1.4.3 Global Rotary Vane Vacuum Pump for Semiconductor Forecasted Market Size by Type (2027-2032)
- 1.5 Key Regions Market Size by Type
- 1.5.1 North America Rotary Vane Vacuum Pump for Semiconductor Sales Breakdown by Type (2021-2026)
- 1.5.2 Europe Rotary Vane Vacuum Pump for Semiconductor Sales Breakdown by Type (2021-2026)
- 1.5.3 Asia-Pacific Rotary Vane Vacuum Pump for Semiconductor Sales Breakdown by Type (2021-2026)
- 1.5.4 South America Rotary Vane Vacuum Pump for Semiconductor Sales Breakdown by Type (2021-2026)
- 1.5.5 Middle East and Africa Rotary Vane Vacuum Pump for Semiconductor Sales Breakdown by Type (2021-2026)
2 Global Market Dynamics
- 2.1 Rotary Vane Vacuum Pump for Semiconductor Industry Trends
- 2.2 Rotary Vane Vacuum Pump for Semiconductor Industry Drivers
- 2.3 Rotary Vane Vacuum Pump for Semiconductor Industry Opportunities and Challenges
- 2.4 Rotary Vane Vacuum Pump for Semiconductor Industry Restraints
3 Market Competitive Landscape by Company
- 3.1 Global Top Players by Rotary Vane Vacuum Pump for Semiconductor Revenue (2021-2026)
- 3.2 Global Top Players by Rotary Vane Vacuum Pump for Semiconductor Sales (2021-2026)
- 3.3 Global Top Players by Rotary Vane Vacuum Pump for Semiconductor Price (2021-2026)
- 3.4 Global Rotary Vane Vacuum Pump for Semiconductor Industry Company Ranking, 2024 VS 2025 VS 2026
- 3.5 Global Rotary Vane Vacuum Pump for Semiconductor Major Company Production Sites & Headquarters
- 3.6 Global Rotary Vane Vacuum Pump for Semiconductor Company, Product Type & Application
- 3.7 Global Rotary Vane Vacuum Pump for Semiconductor Company Establishment Date
- 3.8 Market Competitive Analysis
- 3.8.1 Global Rotary Vane Vacuum Pump for Semiconductor Market CR5 and HHI
- 3.8.2 Global Top 5 and 10 Rotary Vane Vacuum Pump for Semiconductor Players Market Share by Revenue in 2025
- 3.8.3 2025 Rotary Vane Vacuum Pump for Semiconductor Tier 1, Tier 2, and Tier 3
4 Rotary Vane Vacuum Pump for Semiconductor Regional Status and Outlook
- 4.1 Global Rotary Vane Vacuum Pump for Semiconductor Market Size and CAGR by Region: 2021 VS 2025 VS 2032
- 4.2 Global Rotary Vane Vacuum Pump for Semiconductor Historic Market Size by Region
- 4.2.1 Global Rotary Vane Vacuum Pump for Semiconductor Sales in Volume by Region (2021-2026)
- 4.2.2 Global Rotary Vane Vacuum Pump for Semiconductor Sales in Value by Region (2021-2026)
- 4.2.3 Global Rotary Vane Vacuum Pump for Semiconductor Sales (Volume & Value), Price and Gross Margin (2021-2026)
- 4.3 Global Rotary Vane Vacuum Pump for Semiconductor Forecasted Market Size by Region
- 4.3.1 Global Rotary Vane Vacuum Pump for Semiconductor Sales in Volume by Region (2027-2032)
- 4.3.2 Global Rotary Vane Vacuum Pump for Semiconductor Sales in Value by Region (2027-2032)
- 4.3.3 Global Rotary Vane Vacuum Pump for Semiconductor Sales (Volume & Value), Price and Gross Margin (2027-2032)
5 Rotary Vane Vacuum Pump for Semiconductor by Application
- 5.1 Rotary Vane Vacuum Pump for Semiconductor Market by Application
- 5.1.1 Thin Film Deposition
- 5.1.2 Etching
- 5.1.3 Cleaning
- 5.1.4 Crystal Growth
- 5.1.5 Others
- 5.2 Global Rotary Vane Vacuum Pump for Semiconductor Market Size by Application
- 5.2.1 Global Rotary Vane Vacuum Pump for Semiconductor Market Size Overview by Application (2021-2032)
- 5.2.2 Global Rotary Vane Vacuum Pump for Semiconductor Historic Market Size Review by Application (2021-2026)
- 5.2.3 Global Rotary Vane Vacuum Pump for Semiconductor Forecasted Market Size by Application (2027-2032)
- 5.3 Key Regions Market Size by Application
- 5.3.1 North America Rotary Vane Vacuum Pump for Semiconductor Sales Breakdown by Application (2021-2026)
- 5.3.2 Europe Rotary Vane Vacuum Pump for Semiconductor Sales Breakdown by Application (2021-2026)
- 5.3.3 Asia-Pacific Rotary Vane Vacuum Pump for Semiconductor Sales Breakdown by Application (2021-2026)
- 5.3.4 South America Rotary Vane Vacuum Pump for Semiconductor Sales Breakdown by Application (2021-2026)
- 5.3.5 Middle East and Africa Rotary Vane Vacuum Pump for Semiconductor Sales Breakdown by Application (2021-2026)
6 Company Profiles
- 6.1 Atlas Copco
- 6.1.1 Atlas Copco Company Information
- 6.1.2 Atlas Copco Business Overview
- 6.1.3 Atlas Copco Rotary Vane Vacuum Pump for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.1.4 Atlas Copco Rotary Vane Vacuum Pump for Semiconductor Product Portfolio
- 6.1.5 Atlas Copco Recent Developments
- 6.2 ULVAC
- 6.2.1 ULVAC Company Information
- 6.2.2 ULVAC Business Overview
- 6.2.3 ULVAC Rotary Vane Vacuum Pump for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.2.4 ULVAC Rotary Vane Vacuum Pump for Semiconductor Product Portfolio
- 6.2.5 ULVAC Recent Developments
- 6.3 Pfeiffer Vacuum
- 6.3.1 Pfeiffer Vacuum Company Information
- 6.3.2 Pfeiffer Vacuum Business Overview
- 6.3.3 Pfeiffer Vacuum Rotary Vane Vacuum Pump for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.3.4 Pfeiffer Vacuum Rotary Vane Vacuum Pump for Semiconductor Product Portfolio
- 6.3.5 Pfeiffer Vacuum Recent Developments
- 6.4 Osaka Vacuum, Ltd
- 6.4.1 Osaka Vacuum, Ltd Company Information
- 6.4.2 Osaka Vacuum, Ltd Business Overview
- 6.4.3 Osaka Vacuum, Ltd Rotary Vane Vacuum Pump for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.4.4 Osaka Vacuum, Ltd Rotary Vane Vacuum Pump for Semiconductor Product Portfolio
- 6.4.5 Osaka Vacuum, Ltd Recent Developments
- 6.5 Welch (Ingersoll Rand)
- 6.5.1 Welch (Ingersoll Rand) Company Information
- 6.5.2 Welch (Ingersoll Rand) Business Overview
- 6.5.3 Welch (Ingersoll Rand) Rotary Vane Vacuum Pump for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.5.4 Welch (Ingersoll Rand) Rotary Vane Vacuum Pump for Semiconductor Product Portfolio
- 6.5.5 Welch (Ingersoll Rand) Recent Developments
- 6.6 Becker Pumps Corporation
- 6.6.1 Becker Pumps Corporation Company Information
- 6.6.2 Becker Pumps Corporation Business Overview
- 6.6.3 Becker Pumps Corporation Rotary Vane Vacuum Pump for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.6.4 Becker Pumps Corporation Rotary Vane Vacuum Pump for Semiconductor Product Portfolio
- 6.6.5 Becker Pumps Corporation Recent Developments
- 6.7 Zhejiang Value
- 6.7.1 Zhejiang Value Company Information
- 6.7.2 Zhejiang Value Business Overview
- 6.7.3 Zhejiang Value Rotary Vane Vacuum Pump for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.7.4 Zhejiang Value Rotary Vane Vacuum Pump for Semiconductor Product Portfolio
- 6.7.5 Zhejiang Value Recent Developments
7 North America by Country
- 7.1 North America Rotary Vane Vacuum Pump for Semiconductor Sales by Country
- 7.1.1 North America Rotary Vane Vacuum Pump for Semiconductor Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 7.1.2 North America Rotary Vane Vacuum Pump for Semiconductor Sales by Country (2021-2026)
- 7.1.3 North America Rotary Vane Vacuum Pump for Semiconductor Sales Forecast by Country (2027-2032)
- 7.2 North America Rotary Vane Vacuum Pump for Semiconductor Market Size by Country
- 7.2.1 North America Rotary Vane Vacuum Pump for Semiconductor Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 7.2.2 North America Rotary Vane Vacuum Pump for Semiconductor Market Size by Country (2021-2026)
- 7.2.3 North America Rotary Vane Vacuum Pump for Semiconductor Market Size Forecast by Country (2027-2032)
8 Europe by Country
- 8.1 Europe Rotary Vane Vacuum Pump for Semiconductor Sales by Country
- 8.1.1 Europe Rotary Vane Vacuum Pump for Semiconductor Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 8.1.2 Europe Rotary Vane Vacuum Pump for Semiconductor Sales by Country (2021-2026)
- 8.1.3 Europe Rotary Vane Vacuum Pump for Semiconductor Sales Forecast by Country (2027-2032)
- 8.2 Europe Rotary Vane Vacuum Pump for Semiconductor Market Size by Country
- 8.2.1 Europe Rotary Vane Vacuum Pump for Semiconductor Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 8.2.2 Europe Rotary Vane Vacuum Pump for Semiconductor Market Size by Country (2021-2026)
- 8.2.3 Europe Rotary Vane Vacuum Pump for Semiconductor Market Size Forecast by Country (2027-2032)
9 Asia-Pacific by Country
- 9.1 Asia-Pacific Rotary Vane Vacuum Pump for Semiconductor Sales by Country
- 9.1.1 Asia-Pacific Rotary Vane Vacuum Pump for Semiconductor Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 9.1.2 Asia-Pacific Rotary Vane Vacuum Pump for Semiconductor Sales by Country (2021-2026)
- 9.1.3 Asia-Pacific Rotary Vane Vacuum Pump for Semiconductor Sales Forecast by Country (2027-2032)
- 9.2 Asia-Pacific Rotary Vane Vacuum Pump for Semiconductor Market Size by Country
- 9.2.1 Asia-Pacific Rotary Vane Vacuum Pump for Semiconductor Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 9.2.2 Asia-Pacific Rotary Vane Vacuum Pump for Semiconductor Market Size by Country (2021-2026)
- 9.2.3 Asia-Pacific Rotary Vane Vacuum Pump for Semiconductor Market Size Forecast by Country (2027-2032)
10 South America by Country
- 10.1 South America Rotary Vane Vacuum Pump for Semiconductor Sales by Country
- 10.1.1 South America Rotary Vane Vacuum Pump for Semiconductor Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 10.1.2 South America Rotary Vane Vacuum Pump for Semiconductor Sales by Country (2021-2026)
- 10.1.3 South America Rotary Vane Vacuum Pump for Semiconductor Sales Forecast by Country (2027-2032)
- 10.2 South America Rotary Vane Vacuum Pump for Semiconductor Market Size by Country
- 10.2.1 South America Rotary Vane Vacuum Pump for Semiconductor Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 10.2.2 South America Rotary Vane Vacuum Pump for Semiconductor Market Size by Country (2021-2026)
- 10.2.3 South America Rotary Vane Vacuum Pump for Semiconductor Market Size Forecast by Country (2027-2032)
11 Middle East and Africa by Country
- 11.1 Middle East and Africa Rotary Vane Vacuum Pump for Semiconductor Sales by Country
- 11.1.1 Middle East and Africa Rotary Vane Vacuum Pump for Semiconductor Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 11.1.2 Middle East and Africa Rotary Vane Vacuum Pump for Semiconductor Sales by Country (2021-2026)
- 11.1.3 Middle East and Africa Rotary Vane Vacuum Pump for Semiconductor Sales Forecast by Country (2027-2032)
- 11.2 Middle East and Africa Rotary Vane Vacuum Pump for Semiconductor Market Size by Country
- 11.2.1 Middle East and Africa Rotary Vane Vacuum Pump for Semiconductor Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 11.2.2 Middle East and Africa Rotary Vane Vacuum Pump for Semiconductor Market Size by Country (2021-2026)
- 11.2.3 Middle East and Africa Rotary Vane Vacuum Pump for Semiconductor Market Size Forecast by Country (2027-2032)
12 Value Chain and Sales Channels Analysis
- 12.1 Rotary Vane Vacuum Pump for Semiconductor Value Chain Analysis
- 12.1.1 Rotary Vane Vacuum Pump for Semiconductor Key Raw Materials
- 12.1.2 Key Raw Materials Price
- 12.1.3 Raw Materials Key Suppliers
- 12.1.4 Manufacturing Cost Structure
- 12.1.5 Rotary Vane Vacuum Pump for Semiconductor Production Mode & Process
- 12.2 Rotary Vane Vacuum Pump for Semiconductor Sales Channels Analysis
- 12.2.1 Direct Comparison with Distribution Share
- 12.2.2 Rotary Vane Vacuum Pump for Semiconductor Distributors
- 12.2.3 Rotary Vane Vacuum Pump for Semiconductor Customers
13 Concluding Insights
14 Appendix
- 14.1 Reasons for Doing This Study
- 14.2 Research Methodology
- 14.3 Research Process
- 14.4 Authors List of This Report
- 14.5 Data Source
- 14.5.1 Secondary Sources
- 14.5.2 Primary Sources
- 14.6 Disclaimer
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