APO RESEARCH · REPORT
Dry Etching Equipment
Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.
Product & engineering
Understand the product.
Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.
Selected research
Industry Research
Dry Etching Equipment Industry Research Report 2026
Market perspective
Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.
Currently, global production of Dry Etching Equipment is concentrated. The top three manufacturers held 92.16% of the market, in terms of Dry Etching Equipment sales value in 2019.
As for the region, APAC is the largest consumption region, holding 76.07% sales revenue market share in 2019, followed by North America, with 13% market share.
Read the full market overview
Report Scope
This report quantifies the global Dry Etching Equipment market in revenue (US$ million) and, where applicable, sales volume (Units), using 2025 as the base year and providing annual historical and forecast data for 2021–2032.
It standardizes definitions of types and applications, harmonizes vendor attribution, and presents comparable time series by company, type, application, and region/country, including indicative price bands (US$/Units) and concentration ratios (CR5/CR10).
The outputs are intended to support strategy development, budgeting, and performance benchmarking for manufacturers, new entrants, channel partners, and investors; the report also reviews technology shifts and notable product introductions relevant to Dry Etching Equipment.
Key Companies & Market Share Insights
This section profiles leading manufacturers, combining 2021–2025 results with a 2026–2032 outlook. It reports revenue, market share, price bands, product and application mix, regional and channel mix, and key developments (M&A, capacity additions, certifications). It also provides global revenue, average price, and—where applicable—sales volume by manufacturer, and calculates CR5/CR10 and rank changes to support comparative benchmarking.
Dry Etching Equipment Market by Company
Lam Research
TEL
Applied Materials
Hitachi High-Technologies
Oxford Instruments
ULVAC
SPTS Technologies
GigaLane
Plasma-Therm
SAMCO
AMEC
NAURA
Dry Etching Equipment Segment by Type
Inductively Coupled Plasma (ICP)
Capacitive Coupled Plasma (CCP)
Reactive Ion Etching (RIE)
Deep Reactive Ion Etching (DRIE)
Others
Dry Etching Equipment Segment by Application
Logic and Memory
MEMS
Power Device
Others
Dry Etching Equipment Segment by Region
North America
United States
Canada
Mexico
Europe
Germany
France
U.K.
Italy
Russia
Spain
Netherlands
Switzerland
Sweden
Poland
Asia-Pacific
China
Japan
South Korea
India
Australia
Taiwan
Southeast Asia
South America
Brazil
Argentina
Chile
Middle East & Africa
Egypt
South Africa
Israel
Türkiye
GCC Countries
Key Drivers & Barriers
High-impact rendering factors and drivers have been studied in this report to aid the readers to understand the general development. Moreover, the report includes restraints and challenges that may act as stumbling blocks on the way of the players. This will assist the users to be attentive and make informed decisions related to business. Specialists have also laid their focus on the upcoming business prospects.
Reasons to Buy This Report
1. This report will help the readers to understand the competition within the industries and strategies for the competitive environment to enhance the potential profit. The report also focuses on the competitive landscape of the global Dry Etching Equipment market, and introduces in detail the market share, industry ranking, competitor ecosystem, market performance, new product development, operation situation, expansion, and acquisition. etc. of the main players, which helps the readers to identify the main competitors and deeply understand the competition pattern of the market.
2. This report will help stakeholders to understand the global industry status and trends of Dry Etching Equipment and provides them with information on key market drivers, restraints, challenges, and opportunities.
3. This report will help stakeholders to understand competitors better and gain more insights to strengthen their position in their businesses. The competitive landscape section includes the market share and rank (in volume and value), competitor ecosystem, new product development, expansion, and acquisition.
4. This report stays updated with novel technology integration, features, and the latest developments in the market
5. This report helps stakeholders to gain insights into which regions to target globally
6. This report helps stakeholders to gain insights into the end-user perception concerning the adoption of Dry Etching Equipment.
7. This report helps stakeholders to identify some of the key players in the market and understand their valuable contribution.
Chapter Outline
Chapter 1: Research objectives, research methods, data sources, data cross-validation;
Chapter 2: Introduces the report scope of the report, executive summary of different market segments (by region, product type, application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
Chapter 3: Detailed analysis of Dry Etching Equipment manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.
Chapter 4: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.
Chapter 5: Production/output, value of Dry Etching Equipment by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.
Chapter 6: Consumption of Dry Etching Equipment in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.
Chapter 7: Provides the analysis of various market segments by type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 8: Provides the analysis of various market segments by application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 9: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 10: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 11: The main points and conclusions of the report.
More report detail
Tables and figures
Scope & coverage.
Types
- Inductively Coupled Plasma (ICP)
- Capacitive Coupled Plasma (CCP)
- Reactive Ion Etching (RIE)
- Deep Reactive Ion Etching (DRIE)
- Others
Applications
- Logic and Memory
- MEMS
- Power Device
- Others
Companies covered
- Lam Research
- TEL
- Applied Materials
- Hitachi High-Technologies
- Oxford Instruments
- ULVAC
- SPTS Technologies
- GigaLane
- Plasma-Therm
- SAMCO
- AMEC
- NAURA
Inside the report.
1 Preface
- 1.1 Scope of Report
- 1.2 Reasons for Doing This Study
- 1.3 Research Methodology
- 1.4 Research Process
- 1.5 Data Source
- 1.5.1 Secondary Sources
- 1.5.2 Primary Sources
2 Market Overview
- 2.1 Product Definition
- 2.2 Dry Etching Equipment by Type
- 2.2.1 Market Value Comparison by Type (2021 VS 2025 VS 2032) & (US$ Million)
- 2.2.2 Inductively Coupled Plasma (ICP)
- 2.2.3 Capacitive Coupled Plasma (CCP)
- 2.2.4 Reactive Ion Etching (RIE)
- 2.2.5 Deep Reactive Ion Etching (DRIE)
- 2.2.6 Others
- 2.3 Dry Etching Equipment by Application
- 2.3.1 Market Value Comparison by Application (2021 VS 2025 VS 2032) & (US$ Million)
- 2.3.2 Logic and Memory
- 2.3.3 MEMS
- 2.3.4 Power Device
- 2.3.5 Others
- 2.4 Global Market Growth Prospects
- 2.4.1 Global Dry Etching Equipment Production Value Estimates and Forecasts (2021-2032)
- 2.4.2 Global Dry Etching Equipment Production Capacity Estimates and Forecasts (2021-2032)
- 2.4.3 Global Dry Etching Equipment Production Estimates and Forecasts (2021-2032)
- 2.4.4 Global Dry Etching Equipment Market Average Price (2021-2032)
3 Market Competitive Landscape by Manufacturers
- 3.1 Global Dry Etching Equipment Production by Manufacturers (2021-2026)
- 3.2 Global Dry Etching Equipment Production Value by Manufacturers (2021-2026)
- 3.3 Global Dry Etching Equipment Average Price by Manufacturers (2021-2026)
- 3.4 Global Dry Etching Equipment Industry Manufacturers Ranking, 2024 VS 2025 VS 2026
- 3.5 Global Dry Etching Equipment Key Manufacturers, Manufacturing Sites & Headquarters
- 3.6 Global Dry Etching Equipment Manufacturers, Product Type & Application
- 3.7 Global Dry Etching Equipment Manufacturers Established Date
- 3.8 Global Dry Etching Equipment Market CR5 and HHI
- 3.9 Global Manufacturers Mergers & Acquisition
4 Manufacturers Profiled
- 4.1 Lam Research
- 4.1.1 Lam Research Dry Etching Equipment Company Information
- 4.1.2 Lam Research Dry Etching Equipment Business Overview
- 4.1.3 Lam Research Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.1.4 Lam Research Product Portfolio
- 4.1.5 Lam Research Recent Developments
- 4.2 TEL
- 4.2.1 TEL Dry Etching Equipment Company Information
- 4.2.2 TEL Dry Etching Equipment Business Overview
- 4.2.3 TEL Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.2.4 TEL Product Portfolio
- 4.2.5 TEL Recent Developments
- 4.3 Applied Materials
- 4.3.1 Applied Materials Dry Etching Equipment Company Information
- 4.3.2 Applied Materials Dry Etching Equipment Business Overview
- 4.3.3 Applied Materials Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.3.4 Applied Materials Product Portfolio
- 4.3.5 Applied Materials Recent Developments
- 4.4 Hitachi High-Technologies
- 4.4.1 Hitachi High-Technologies Dry Etching Equipment Company Information
- 4.4.2 Hitachi High-Technologies Dry Etching Equipment Business Overview
- 4.4.3 Hitachi High-Technologies Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.4.4 Hitachi High-Technologies Product Portfolio
- 4.4.5 Hitachi High-Technologies Recent Developments
- 4.5 Oxford Instruments
- 4.5.1 Oxford Instruments Dry Etching Equipment Company Information
- 4.5.2 Oxford Instruments Dry Etching Equipment Business Overview
- 4.5.3 Oxford Instruments Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.5.4 Oxford Instruments Product Portfolio
- 4.5.5 Oxford Instruments Recent Developments
- 4.6 ULVAC
- 4.6.1 ULVAC Dry Etching Equipment Company Information
- 4.6.2 ULVAC Dry Etching Equipment Business Overview
- 4.6.3 ULVAC Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.6.4 ULVAC Product Portfolio
- 4.6.5 ULVAC Recent Developments
- 4.7 SPTS Technologies
- 4.7.1 SPTS Technologies Dry Etching Equipment Company Information
- 4.7.2 SPTS Technologies Dry Etching Equipment Business Overview
- 4.7.3 SPTS Technologies Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.7.4 SPTS Technologies Product Portfolio
- 4.7.5 SPTS Technologies Recent Developments
- 4.8 GigaLane
- 4.8.1 GigaLane Dry Etching Equipment Company Information
- 4.8.2 GigaLane Dry Etching Equipment Business Overview
- 4.8.3 GigaLane Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.8.4 GigaLane Product Portfolio
- 4.8.5 GigaLane Recent Developments
- 4.9 Plasma-Therm
- 4.9.1 Plasma-Therm Dry Etching Equipment Company Information
- 4.9.2 Plasma-Therm Dry Etching Equipment Business Overview
- 4.9.3 Plasma-Therm Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.9.4 Plasma-Therm Product Portfolio
- 4.9.5 Plasma-Therm Recent Developments
- 4.10 SAMCO
- 4.10.1 SAMCO Dry Etching Equipment Company Information
- 4.10.2 SAMCO Dry Etching Equipment Business Overview
- 4.10.3 SAMCO Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.10.4 SAMCO Product Portfolio
- 4.10.5 SAMCO Recent Developments
- 4.11 AMEC
- 4.11.1 AMEC Dry Etching Equipment Company Information
- 4.11.2 AMEC Dry Etching Equipment Business Overview
- 4.11.3 AMEC Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.11.4 AMEC Product Portfolio
- 4.11.5 AMEC Recent Developments
- 4.12 NAURA
- 4.12.1 NAURA Dry Etching Equipment Company Information
- 4.12.2 NAURA Dry Etching Equipment Business Overview
- 4.12.3 NAURA Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
- 4.12.4 NAURA Product Portfolio
- 4.12.5 NAURA Recent Developments
5 Global Dry Etching Equipment Production by Region
- 5.1 Global Dry Etching Equipment Production Estimates and Forecasts by Region: 2021 VS 2025 VS 2032
- 5.2 Global Dry Etching Equipment Production by Region: 2021-2032
- 5.2.1 Global Dry Etching Equipment Production by Region: 2021-2026
- 5.2.2 Global Dry Etching Equipment Production Forecast by Region (2027-2032)
- 5.3 Global Dry Etching Equipment Production Value Estimates and Forecasts by Region: 2021 VS 2025 VS 2032
- 5.4 Global Dry Etching Equipment Production Value by Region: 2021-2032
- 5.4.1 Global Dry Etching Equipment Production Value by Region: 2021-2026
- 5.4.2 Global Dry Etching Equipment Production Value Forecast by Region (2027-2032)
- 5.5 Global Dry Etching Equipment Market Price Analysis by Region (2021-2026)
- 5.6 Global Dry Etching Equipment Production and Value, YOY Growth
- 5.6.1 North America Dry Etching Equipment Production Value Estimates and Forecasts (2021-2032)
- 5.6.2 Europe Dry Etching Equipment Production Value Estimates and Forecasts (2021-2032)
- 5.6.3 China Dry Etching Equipment Production Value Estimates and Forecasts (2021-2032)
- 5.6.4 Japan Dry Etching Equipment Production Value Estimates and Forecasts (2021-2032)
- 5.6.5 South Korea Dry Etching Equipment Production Value Estimates and Forecasts (2021-2032)
6 Global Dry Etching Equipment Consumption by Region
- 6.1 Global Dry Etching Equipment Consumption Estimates and Forecasts by Region: 2021 VS 2025 VS 2032
- 6.2 Global Dry Etching Equipment Consumption by Region (2021-2032)
- 6.2.1 Global Dry Etching Equipment Consumption by Region: 2021-2026
- 6.2.2 Global Dry Etching Equipment Forecasted Consumption by Region (2027-2032)
- 6.3 North America
- 6.3.1 North America Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032
- 6.3.2 North America Dry Etching Equipment Consumption by Country (2021-2032)
- 6.3.3 United States
- 6.3.4 Canada
- 6.3.5 Mexico
- 6.4 Europe
- 6.4.1 Europe Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032
- 6.4.2 Europe Dry Etching Equipment Consumption by Country (2021-2032)
- 6.4.3 Germany
- 6.4.4 France
- 6.4.5 U.K.
- 6.4.6 Italy
- 6.4.7 Russia
- 6.4.8 Spain
- 6.4.9 Netherlands
- 6.4.10 Switzerland
- 6.4.11 Sweden
- 6.4.12 Poland
- 6.5 Asia Pacific
- 6.5.1 Asia Pacific Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032
- 6.5.2 Asia Pacific Dry Etching Equipment Consumption by Country (2021-2032)
- 6.5.3 China
- 6.5.4 Japan
- 6.5.5 South Korea
- 6.5.6 India
- 6.5.7 Australia
- 6.5.8 Taiwan
- 6.5.9 Southeast Asia
- 6.6 South America, Middle East & Africa
- 6.6.1 South America, Middle East & Africa Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032
- 6.6.2 South America, Middle East & Africa Dry Etching Equipment Consumption by Country (2021-2032)
- 6.6.3 Brazil
- 6.6.4 Argentina
- 6.6.5 Chile
- 6.6.6 Turkey
- 6.6.7 GCC Countries
7 Segment by Type
- 7.1 Global Dry Etching Equipment Production by Type (2021-2032)
- 7.1.1 Global Dry Etching Equipment Production by Type (2021-2032) & (Units)
- 7.1.2 Global Dry Etching Equipment Production Market Share by Type (2021-2032)
- 7.2 Global Dry Etching Equipment Production Value by Type (2021-2032)
- 7.2.1 Global Dry Etching Equipment Production Value by Type (2021-2032) & (US$ Million)
- 7.2.2 Global Dry Etching Equipment Production Value Market Share by Type (2021-2032)
- 7.3 Global Dry Etching Equipment Price by Type (2021-2032)
8 Segment by Application
- 8.1 Global Dry Etching Equipment Production by Application (2021-2032)
- 8.1.1 Global Dry Etching Equipment Production by Application (2021-2032) & (Units)
- 8.1.2 Global Dry Etching Equipment Production Market Share by Application (2021-2032)
- 8.2 Global Dry Etching Equipment Production Value by Application (2021-2032)
- 8.2.1 Global Dry Etching Equipment Production Value by Application (2021-2032) & (US$ Million)
- 8.2.2 Global Dry Etching Equipment Production Value Market Share by Application (2021-2032)
- 8.3 Global Dry Etching Equipment Price by Application (2021-2032)
9 Value Chain and Sales Channels Analysis of the Market
- 9.1 Dry Etching Equipment Value Chain Analysis
- 9.1.1 Dry Etching Equipment Key Raw Materials
- 9.1.2 Raw Materials Key Suppliers
- 9.1.3 Dry Etching Equipment Production Mode & Process
- 9.2 Dry Etching Equipment Sales Channels Analysis
- 9.2.1 Direct Comparison with Distribution Share
- 9.2.2 Dry Etching Equipment Distributors
- 9.2.3 Dry Etching Equipment Customers
10 Global Dry Etching Equipment Analyzing Market Dynamics
- 10.1 Dry Etching Equipment Industry Trends
- 10.2 Dry Etching Equipment Industry Drivers
- 10.3 Dry Etching Equipment Industry Opportunities and Challenges
- 10.4 Dry Etching Equipment Industry Restraints
11 Report Conclusion
12 Disclaimer
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