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Dry Etching Equipment

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.

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Product & engineering

Understand the product.

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.

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Industry Growth & Trends

Global Dry Etching Equipment Industry Growth and Trends Forecast to 2032

Report ID 173567790128 December 2025106 pages

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Industry ResearchDry Etching Equipment Industry Research Report 2026121 pages · $2,950 USDIndustry Growth & TrendsGlobal Dry Etching Equipment Industry Growth and Trends Forecast to 2032106 pages · $3,450 USDMarket StructureGlobal Dry Etching Equipment Market by Size, by Type, by Application, by Region, History and Forecast 2021-2032199 pages · $3,950 USDMarket Outlook & Growth OpportunitiesGlobal Dry Etching Equipment Market Outlook and Growth Opportunities 2026199 pages · $4,250 USDMarket Analysis & ForecastGlobal Dry Etching Equipment Market Analysis and Forecast 2026-2032216 pages · $4,950 USD

Market perspective

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.

Currently, global production of Dry Etching Equipment is concentrated. The top three manufacturers held 92.16% of the market, in terms of Dry Etching Equipment sales value in 2019.

As for the region, APAC is the largest consumption region, holding 76.07% sales revenue market share in 2019, followed by North America, with 13% market share.

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Report Scope

This report provides a structured, data-driven view of the global Dry Etching Equipment market, combining harmonized quantitative metrics with targeted qualitative insight to support business and growth strategy, market positioning, and capital allocation.

The Dry Etching Equipment market size, estimates, and forecasts are presented in terms of sales volume (Units) and revenue (US$ million), with 2025 as the base year and historical and forecast data for 2021-2032. The report segments the global Dry Etching Equipment market by Type, Application, region/country, and company, provides regional market sizes at the segment level, profiles the competitive landscape and key players and their market ranks, and reviews technology trends and new product developments relevant to Dry Etching Equipment.

Key Companies & Market Share Insights

This section analyzes the strategies and performance of leading manufacturers in the global Dry Etching Equipment market, including portfolio focus, innovation and product development, mergers and acquisitions, collaborations, and geographic expansion used to sustain or enhance competitive positions. It also summarizes recent corporate developments and key financial indicators and provides global revenue, price, and sales volume data by manufacturer for 2020-2025, enabling benchmarking of scale, pricing, and market share and supporting assessment of market concentration through indicators such as CR5 and CR10.

Dry Etching Equipment Market by Company

Lam Research

TEL

Applied Materials

Hitachi High-Technologies

Oxford Instruments

ULVAC

SPTS Technologies

GigaLane

Plasma-Therm

SAMCO

AMEC

NAURA

Dry Etching Equipment Segment by Type

Inductively Coupled Plasma (ICP)

Capacitive Coupled Plasma (CCP)

Reactive Ion Etching (RIE)

Deep Reactive Ion Etching (DRIE)

Others

Dry Etching Equipment Segment by Application

Logic and Memory

MEMS

Power Device

Others

Dry Etching Equipment Segment by Region

North America

United States

Canada

Mexico

Europe

Germany

France

U.K.

Italy

Russia

Spain

Netherlands

Switzerland

Sweden

Poland

Asia-Pacific

China

Japan

South Korea

India

Australia

Taiwan

Southeast Asia

South America

Brazil

Argentina

Chile

Middle East & Africa

Egypt

South Africa

Israel

Türkiye

GCC Countries

Key Drivers & Barriers

High-impact rendering factors and drivers have been studied in this report to aid the readers to understand the general development. Moreover, the report includes restraints and challenges that may act as stumbling blocks on the way of the players. This will assist the users to be attentive and make informed decisions related to business. Specialists have also laid their focus on the upcoming business prospects.

Reasons to Buy This Report

1. This report will help the readers to understand the competition within the industries and strategies for the competitive environment to enhance the potential profit. The report also focuses on the competitive landscape of the global Dry Etching Equipment market, and introduces in detail the market share, industry ranking, competitor ecosystem, market performance, new product development, operation situation, expansion, and acquisition. etc. of the main players, which helps the readers to identify the main competitors and deeply understand the competition pattern of the market.

2. This report will help stakeholders to understand the global industry status and trends of Dry Etching Equipment and provides them with information on key market drivers, restraints, challenges, and opportunities.

3. This report will help stakeholders to understand competitors better and gain more insights to strengthen their position in their businesses. The competitive landscape section includes the market share and rank (in volume and value), competitor ecosystem, new product development, expansion, and acquisition.

4. This report stays updated with novel technology integration, features, and the latest developments in the market.

5. This report helps stakeholders to gain insights into which regions to target globally.

6. This report helps stakeholders to gain insights into the end-user perception concerning the adoption of Dry Etching Equipment.

7. This report helps stakeholders to identify some of the key players in the market and understand their valuable contribution.

Chapter Outline

Chapter 1: Introduces the study scope of this report, executive summary of market segments by type, market size segments for North America, Europe, Asia Pacific, South America, Middle East & Africa.

Chapter 2: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.

Chapter 3: Detailed analysis of Dry Etching Equipment manufacturers competitive landscape, price, sales, revenue, market share and ranking, latest development plan, merger, and acquisition information, etc.

Chapter 4: Sales, revenue of Dry Etching Equipment in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the future development prospects, and market space in the world.

Chapter 5: Introduces market segments by application, market size segment for North America, Europe, Asia Pacific, South America, Middle East & Africa.

Chapter 6: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.

Chapter 7, 8, 9, 10 and 11: North America, Europe, Asia Pacific, South America, Middle East & Africa, sales and revenue by country.

Chapter 12: Analysis of industrial chain, key raw materials, manufacturing cost, and market dynamics.

Chapter 13: Concluding Insights of the report.

More report detail

Tables and figures
List of Tables Table 1. Major Company of Inductively Coupled Plasma (ICP) Table 2. Major Company of Capacitive Coupled Plasma (CCP) Table 3. Major Company of Reactive Ion Etching (RIE) Table 4. Major Company of Deep Reactive Ion Etching (DRIE) Table 5. Major Company of Others Table 6. Global Dry Etching Equipment Sales by Type (2021 VS 2025 VS 2032) & (US$ Million) Table 7. Global Dry Etching Equipment Sales by Type (2021-2026) & (Units) Table 8. Global Dry Etching Equipment Sales Market Share in Volume by Type (2021-2026) Table 9. Global Dry Etching Equipment Sales by Type (2021-2026) & (US$ Million) Table 10. Global Dry Etching Equipment Sales Market Share in Value by Type (2021-2026) Table 11. Global Dry Etching Equipment Price by Type (2021-2026) & (K USD/Unit) Table 12. Global Dry Etching Equipment Sales by Type (2027-2032) & (Units) Table 13. Global Dry Etching Equipment Sales Market Share in Volume by Type (2027-2032) Table 14. Global Dry Etching Equipment Sales by Type (2027-2032) & (US$ Million) Table 15. Global Dry Etching Equipment Sales Market Share in Value by Type (2027-2032) Table 16. Global Dry Etching Equipment Price by Type (2027-2032) & (K USD/Unit) Table 17. North America Dry Etching Equipment Sales by Type (2021-2026) & (Units) Table 18. North America Dry Etching Equipment Sales by Type (2021-2026) & (US$ Million) Table 19. Europe Dry Etching Equipment Sales by Type (2021-2026) & (Units) Table 20. Europe Dry Etching Equipment Sales by Type (2021-2026) & (US$ Million) Table 21. Asia-Pacific Dry Etching Equipment Sales by Type (2021-2026) & (Units) Table 22. Asia-Pacific Dry Etching Equipment Sales by Type (2021-2026) & (US$ Million) Table 23. Latin America Dry Etching Equipment Sales by Type (2021-2026) & (Units) Table 24. Latin America Dry Etching Equipment Sales by Type (2021-2026) & (US$ Million) Table 25. Middle East and Africa Dry Etching Equipment Sales by Type (2021-2026) & (Units) Table 26. Middle East and Africa Dry Etching Equipment Sales by Type (2021-2026) & (US$ Million) Table 27. Dry Etching Equipment Industry Trends Table 28. Dry Etching Equipment Industry Drivers Table 29. Dry Etching Equipment Industry Opportunities and Challenges Table 30. Dry Etching Equipment Industry Restraints Table 31. Global Dry Etching Equipment Sales Revenue by Company (US$ Million) & (2021-2026) Table 32. Global Dry Etching Equipment Revenue Market Share by Company (2021-2026) Table 33. Global Dry Etching Equipment Sales by Company (2021-2026) & (Units) Table 34. Global Dry Etching Equipment Sales Share by Company (2021-2026) Table 35. Global Dry Etching Equipment Market Price by Company (2021-2026) & (K USD/Unit) Table 36. Global Dry Etching Equipment Industry Company Ranking, 2024 VS 2025 VS 2026 Table 37. Global Dry Etching Equipment Major Company Production Sites and Headquarters Table 38. Global Dry Etching Equipment Company, Product Type & Application Table 39. Global Dry Etching Equipment Company Establishment Date Table 40. Global Company Market Concentration Ratio (CR5 and HHI) Table 41. Global Dry Etching Equipment by Company Type (Tier 1, Tier 2, and Tier 3) & (Based on the Revenue of 2025) Table 42. Global Dry Etching Equipment Market Size Comparison by Region (US$ Million): 2021 VS 2025 VS 2032 Table 43. Global Dry Etching Equipment Sales by Region (2021-2026) & (Units) Table 44. Global Dry Etching Equipment Sales Market Share in Volume by Region (2021-2026) Table 45. Global Dry Etching Equipment Sales by Region (2021-2026) & (US$ Million) Table 46. Global Dry Etching Equipment Sales Market Share in Value by Region (2021-2026) Table 47. Global Dry Etching Equipment Sales (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 48. Global Dry Etching Equipment Sales by Region (2027-2032) & (Units) Table 49. Global Dry Etching Equipment Sales Market Share in Volume by Region (2027-2032) Table 50. Global Dry Etching Equipment Sales by Region (2027-2032) & (US$ Million) Table 51. Global Dry Etching Equipment Sales Market Share in Value by Region (2027-2032) Table 52. Global Dry Etching Equipment Sales (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2027-2032) Table 53. Global Dry Etching Equipment Sales by Application (2021 VS 2025 VS 2032) & (US$ Million) Table 54. Global Dry Etching Equipment Sales by Application (2021-2026) & (Units) Table 55. Global Dry Etching Equipment Sales Market Share in Volume by Application (2021-2026) Table 56. Global Dry Etching Equipment Sales by Application (2021-2026) & (US$ Million) Table 57. Global Dry Etching Equipment Sales Market Share in Value by Application (2021-2026) Table 58. Global Dry Etching Equipment Price by Application (2021-2026) & (K USD/Unit) Table 59. Global Dry Etching Equipment Sales by Application (2027-2032) & (Units) Table 60. Global Dry Etching Equipment Sales Market Share in Volume by Application (2027-2032) Table 61. Global Dry Etching Equipment Sales by Application (2027-2032) & (US$ Million) Table 62. Global Dry Etching Equipment Sales Market Share in Value by Application (2027-2032) Table 63. Global Dry Etching Equipment Price by Application (2027-2032) & (K USD/Unit) Table 64. North America Dry Etching Equipment Sales by Application (2021-2026) & (Units) Table 65. North America Dry Etching Equipment Sales by Application (2021-2026) & (US$ Million) Table 66. Europe Dry Etching Equipment Sales by Application (2021-2026) & (Units) Table 67. Europe Dry Etching Equipment Sales by Application (2021-2026) & (US$ Million) Table 68. Asia-Pacific Dry Etching Equipment Sales by Application (2021-2026) & (Units) Table 69. Asia-Pacific Dry Etching Equipment Sales by Application (2021-2026) & (US$ Million) Table 70. Latin America Dry Etching Equipment Sales by Application (2021-2026) & (Units) Table 71. Latin America Dry Etching Equipment Sales by Application (2021-2026) & (US$ Million) Table 72. Middle East and Africa Dry Etching Equipment Sales by Application (2021-2026) & (Units) Table 73. Middle East and Africa Dry Etching Equipment Sales by Application (2021-2026) & (US$ Million) Table 74. Lam Research Company Information Table 75. Lam Research Business Overview Table 76. Lam Research Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 77. Lam Research Dry Etching Equipment Product Portfolio Table 78. Lam Research Recent Development Table 79. TEL Company Information Table 80. TEL Business Overview Table 81. TEL Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 82. TEL Dry Etching Equipment Product Portfolio Table 83. TEL Recent Development Table 84. Applied Materials Company Information Table 85. Applied Materials Business Overview Table 86. Applied Materials Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 87. Applied Materials Dry Etching Equipment Product Portfolio Table 88. Applied Materials Recent Development Table 89. Hitachi High-Technologies Company Information Table 90. Hitachi High-Technologies Business Overview Table 91. Hitachi High-Technologies Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 92. Hitachi High-Technologies Dry Etching Equipment Product Portfolio Table 93. Hitachi High-Technologies Recent Development Table 94. Oxford Instruments Company Information Table 95. Oxford Instruments Business Overview Table 96. Oxford Instruments Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 97. Oxford Instruments Dry Etching Equipment Product Portfolio Table 98. Oxford Instruments Recent Development Table 99. ULVAC Company Information Table 100. ULVAC Business Overview Table 101. ULVAC Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 102. ULVAC Dry Etching Equipment Product Portfolio Table 103. ULVAC Recent Development Table 104. SPTS Technologies Company Information Table 105. SPTS Technologies Business Overview Table 106. SPTS Technologies Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 107. SPTS Technologies Dry Etching Equipment Product Portfolio Table 108. SPTS Technologies Recent Development Table 109. GigaLane Company Information Table 110. GigaLane Business Overview Table 111. GigaLane Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 112. GigaLane Dry Etching Equipment Product Portfolio Table 113. GigaLane Recent Development Table 114. Plasma-Therm Company Information Table 115. Plasma-Therm Business Overview Table 116. Plasma-Therm Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 117. Plasma-Therm Dry Etching Equipment Product Portfolio Table 118. Plasma-Therm Recent Development Table 119. SAMCO Company Information Table 120. SAMCO Business Overview Table 121. SAMCO Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 122. SAMCO Dry Etching Equipment Product Portfolio Table 123. SAMCO Recent Development Table 124. AMEC Company Information Table 125. AMEC Business Overview Table 126. AMEC Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 127. AMEC Dry Etching Equipment Product Portfolio Table 128. AMEC Recent Development Table 129. NAURA Company Information Table 130. NAURA Business Overview Table 131. NAURA Dry Etching Equipment Sales (Units), Revenue (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 132. NAURA Dry Etching Equipment Product Portfolio Table 133. NAURA Recent Development Table 134. North America Dry Etching Equipment Market Size Growth Rate (CAGR) by Country (Units): 2021 VS 2025 VS 2032 Table 135. North America Dry Etching Equipment Sales by Country (2021-2026) & (Units) Table 136. North America Dry Etching Equipment Sales Market Share by Country (2021-2026) Table 137. North America Dry Etching Equipment Sales Forecast by Country (2027-2032) & (Units) Table 138. North America Dry Etching Equipment Sales Market Share Forecast by Country (2027-2032) Table 139. North America Dry Etching Equipment Market Size Growth Rate (CAGR) by Country (US$ Million): 2021 VS 2025 VS 2032 Table 140. North America Dry Etching Equipment Market Size by Country (2021-2026) & (US$ Million) Table 141. North America Dry Etching Equipment Market Share by Country (2021-2026) Table 142. North America Dry Etching Equipment Market Size Forecast by Country (2027-2032) & (US$ Million) Table 143. North America Dry Etching Equipment Market Share Forecast by Country (2027-2032) Table 144. Europe Dry Etching Equipment Market Size Growth Rate (CAGR) by Country (Units): 2021 VS 2025 VS 2032 Table 145. Europe Dry Etching Equipment Sales by Country (2021-2026) & (Units) Table 146. Europe Dry Etching Equipment Sales Market Share by Country (2021-2026) Table 147. Europe Dry Etching Equipment Sales Forecast by Country (2027-2032) & (Units) Table 148. Europe Dry Etching Equipment Sales Market Share Forecast by Country (2027-2032) Table 149. Europe Dry Etching Equipment Market Size Growth Rate (CAGR) by Country (US$ Million): 2021 VS 2025 VS 2032 Table 150. Europe Dry Etching Equipment Market Size by Country (2021-2026) & (US$ Million) Table 151. Europe Dry Etching Equipment Market Share by Country (2021-2026) Table 152. Europe Dry Etching Equipment Market Size Forecast by Country (2027-2032) & (US$ Million) Table 153. Europe Dry Etching Equipment Market Share Forecast by Country (2027-2032) Table 154. Asia-Pacific Dry Etching Equipment Market Size Growth Rate (CAGR) by Country (Units): 2021 VS 2025 VS 2032 Table 155. Asia-Pacific Dry Etching Equipment Sales by Country (2021-2026) & (Units) Table 156. Asia-Pacific Dry Etching Equipment Sales Market Share by Country (2021-2026) Table 157. Asia-Pacific Dry Etching Equipment Sales Forecast by Country (2027-2032) & (Units) Table 158. Asia-Pacific Dry Etching Equipment Sales Market Share Forecast by Country (2027-2032) Table 159. Asia-Pacific Dry Etching Equipment Market Size Growth Rate (CAGR) by Country (US$ Million): 2021 VS 2025 VS 2032 Table 160. Asia-Pacific Dry Etching Equipment Market Size by Country (2021-2026) & (US$ Million) Table 161. Asia-Pacific Dry Etching Equipment Market Share by Country (2021-2026) Table 162. Asia-Pacific Dry Etching Equipment Market Size Forecast by Country (2027-2032) & (US$ Million) Table 163. Asia-Pacific Dry Etching Equipment Market Share Forecast by Country (2027-2032) Table 164. Latin America Dry Etching Equipment Market Size Growth Rate (CAGR) by Country (Units): 2021 VS 2025 VS 2032 Table 165. Latin America Dry Etching Equipment Sales by Country (2021-2026) & (Units) Table 166. Latin America Dry Etching Equipment Sales Market Share by Country (2021-2026) Table 167. Latin America Dry Etching Equipment Sales Forecast by Country (2027-2032) & (Units) Table 168. Latin America Dry Etching Equipment Sales Market Share Forecast by Country (2027-2032) Table 169. Latin America Dry Etching Equipment Market Size Growth Rate (CAGR) by Country (US$ Million): 2021 VS 2025 VS 2032 Table 170. Latin America Dry Etching Equipment Market Size by Country (2021-2026) & (US$ Million) Table 171. Latin America Dry Etching Equipment Market Share by Country (2021-2026) Table 172. Latin America Dry Etching Equipment Market Size Forecast by Country (2027-2032) & (US$ Million) Table 173. Latin America Dry Etching Equipment Market Share Forecast by Country (2027-2032) Table 174. Middle East and Africa Dry Etching Equipment Market Size Growth Rate (CAGR) by Country (Units): 2021 VS 2025 VS 2032 Table 175. Middle East and Africa Dry Etching Equipment Sales by Country (2021-2026) & (Units) Table 176. Middle East and Africa Dry Etching Equipment Sales Market Share by Country (2021-2026) Table 177. Middle East and Africa Dry Etching Equipment Sales Forecast by Country (2027-2032) & (Units) Table 178. Middle East and Africa Dry Etching Equipment Sales Market Share Forecast by Country (2027-2032) Table 179. Middle East and Africa Dry Etching Equipment Market Size Growth Rate (CAGR) by Country (US$ Million): 2021 VS 2025 VS 2032 Table 180. Middle East and Africa Dry Etching Equipment Market Size by Country (2021-2026) & (US$ Million) Table 181. Middle East and Africa Dry Etching Equipment Market Share by Country (2021-2026) Table 182. Middle East and Africa Dry Etching Equipment Market Size Forecast by Country (2027-2032) & (US$ Million) Table 183. Middle East and Africa Dry Etching Equipment Market Share Forecast by Country (2027-2032) Table 184. Key Raw Materials Table 185. Raw Materials Key Suppliers Table 186. Dry Etching Equipment Distributors List Table 187. Dry Etching Equipment Customers List Table 188. Research Programs/Design for This Report Table 189. Authors List of This Report Table 190. Secondary Sources Table 191. Primary Sources List of Figures Figure 1. Dry Etching Equipment Image Figure 2. Global Dry Etching Equipment Market Size (US$ Million), 2021 VS 2025 VS 2032 Figure 3. Global Dry Etching Equipment Market Size (2021-2032) & (US$ Million) Figure 4. Global Dry Etching Equipment Sales (2021-2032) & (Units) Figure 5. Inductively Coupled Plasma (ICP) Image Figure 6. Global Inductively Coupled Plasma (ICP) Sales YoY Growth (2021-2032) & (Units) Figure 7. Capacitive Coupled Plasma (CCP) Image Figure 8. Global Capacitive Coupled Plasma (CCP) Sales YoY Growth (2021-2032) & (Units) Figure 9. Reactive Ion Etching (RIE) Image Figure 10. Global Reactive Ion Etching (RIE) Sales YoY Growth (2021-2032) & (Units) Figure 11. Deep Reactive Ion Etching (DRIE) Image Figure 12. Global Deep Reactive Ion Etching (DRIE) Sales YoY Growth (2021-2032) & (Units) Figure 13. Others Image Figure 14. Global Others Sales YoY Growth (2021-2032) & (Units) Figure 15. Global Dry Etching Equipment Market Size Overview by Type (2021-2032) & (US$ Million) Figure 16. Global Dry Etching Equipment Market Share by Type 2025 VS 2032 Figure 17. North America Dry Etching Equipment Sales Market Share in Volume by Type in 2025 Figure 18. North America Dry Etching Equipment Sales Market Share in Value by Type in 2025 Figure 19. Europe Dry Etching Equipment Sales Market Share in Volume by Type in 2025 Figure 20. Europe Dry Etching Equipment Sales Market Share in Value by Type in 2025 Figure 21. Asia-Pacific Dry Etching Equipment Sales Market Share in Volume by Type in 2025 Figure 22. Asia-Pacific Dry Etching Equipment Sales Market Share in Value by Type in 2025 Figure 23. Latin America Dry Etching Equipment Sales Market Share in Volume by Type in 2025 Figure 24. Latin America Dry Etching Equipment Sales Market Share in Value by Type in 2025 Figure 25. Middle East and Africa Dry Etching Equipment Sales Market Share in Volume by Type in 2025 Figure 26. Middle East and Africa Dry Etching Equipment Sales Market Share in Value by Type in 2025 Figure 27. Global Top 5 and 10 Dry Etching Equipment Players Market Share by Revenue in 2025 Figure 28. Company Type (Tier 1, Tier 2, and Tier 3): 2021 VS 2025 Figure 29. Logic and Memory Image Figure 30. Global Logic and Memory Sales YoY Growth (2021-2032) & (Units) Figure 31. MEMS Image Figure 32. Global MEMS Sales YoY Growth (2021-2032) & (Units) Figure 33. Power Device Image Figure 34. Global Power Device Sales YoY Growth (2021-2032) & (Units) Figure 35. Others Image Figure 36. Global Others Sales YoY Growth (2021-2032) & (Units) Figure 37. Global Dry Etching Equipment Market Size Overview by Application (2021-2032) & (US$ Million) Figure 38. Global Dry Etching Equipment Market Share by Application 2025 VS 2032 Figure 39. North America Dry Etching Equipment Sales Market Share in Volume by Application in 2025 Figure 40. North America Dry Etching Equipment Sales Market Share in Value by Application in 2025 Figure 41. Europe Dry Etching Equipment Sales Market Share in Volume by Application in 2025 Figure 42. Europe Dry Etching Equipment Sales Market Share in Value by Application in 2025 Figure 43. Asia-Pacific Dry Etching Equipment Sales Market Share in Volume by Application in 2025 Figure 44. Asia-Pacific Dry Etching Equipment Sales Market Share in Value by Application in 2025 Figure 45. Latin America Dry Etching Equipment Sales Market Share in Volume by Application in 2025 Figure 46. Latin America Dry Etching Equipment Sales Market Share in Value by Application in 2025 Figure 47. Middle East and Africa Dry Etching Equipment Sales Market Share in Volume by Application in 2025 Figure 48. Middle East and Africa Dry Etching Equipment Sales Market Share in Value by Application in 2025 Figure 49. North America Dry Etching Equipment Sales by Country: 2021 VS 2025 VS 2032 (Units) Figure 50. North America Dry Etching Equipment Sales Share by Country: 2021 VS 2025 VS 2032 Figure 51. North America Dry Etching Equipment Market Size by Country: 2021 VS 2025 VS 2032 (US$ Million) Figure 52. North America Dry Etching Equipment Market Share by Country: 2021 VS 2025 VS 2032 Figure 53. Europe Dry Etching Equipment Sales by Country: 2021 VS 2025 VS 2032 (Units) Figure 54. Europe Dry Etching Equipment Sales Share by Country: 2021 VS 2025 VS 2032 Figure 55. Europe Dry Etching Equipment Market Size by Country: 2021 VS 2025 VS 2032 (US$ Million) Figure 56. Europe Dry Etching Equipment Market Share by Country: 2021 VS 2025 VS 2032 Figure 57. Asia-Pacific Dry Etching Equipment Sales by Country: 2021 VS 2025 VS 2032 (Units) Figure 58. Asia-Pacific Dry Etching Equipment Sales Share by Country: 2021 VS 2025 VS 2032 Figure 59. Asia-Pacific Dry Etching Equipment Market Size by Country: 2021 VS 2025 VS 2032 (US$ Million) Figure 60. Asia-Pacific Dry Etching Equipment Market Share by Country: 2021 VS 2025 VS 2032 Figure 61. Latin America Dry Etching Equipment Sales by Country: 2021 VS 2025 VS 2032 (Units) Figure 62. Latin America Dry Etching Equipment Sales Share by Country: 2021 VS 2025 VS 2032 Figure 63. Latin America Dry Etching Equipment Market Size by Country: 2021 VS 2025 VS 2032 (US$ Million) Figure 64. Latin America Dry Etching Equipment Market Share by Country: 2021 VS 2025 VS 2032 Figure 65. Middle East and Africa Dry Etching Equipment Sales by Country: 2021 VS 2025 VS 2032 (Units) Figure 66. Middle East and Africa Dry Etching Equipment Sales Share by Country: 2021 VS 2025 VS 2032 Figure 67. Middle East and Africa Dry Etching Equipment Market Size by Country: 2021 VS 2025 VS 2032 (US$ Million) Figure 68. Middle East and Africa Dry Etching Equipment Market Share by Country: 2021 VS 2025 VS 2032 Figure 69. Dry Etching Equipment Value Chain Figure 70. Key Raw Materials Price Figure 71. Manufacturing Cost Structure Figure 72. Dry Etching Equipment Production Mode & Process Figure 73. Direct Comparison with Distribution Share Figure 74. Distributors Profiles Figure 75. Years Considered Figure 76. Research Process Figure 77. Key Executives Interviewed

Scope & coverage.

Types
  • Inductively Coupled Plasma (ICP)
  • Capacitive Coupled Plasma (CCP)
  • Reactive Ion Etching (RIE)
  • Deep Reactive Ion Etching (DRIE)
  • Others
Applications
  • Logic and Memory
  • MEMS
  • Power Device
  • Others
Companies covered
  • Lam Research
  • TEL
  • Applied Materials
  • Hitachi High-Technologies
  • Oxford Instruments
  • ULVAC
  • SPTS Technologies
  • GigaLane
  • Plasma-Therm
  • SAMCO
  • AMEC
  • NAURA

Inside the report.

1 Market Overview
  1. 1.1 Product Definition
  2. 1.2 Global Market Growth Prospects
  3. 1.2.1 Global Dry Etching Equipment Market Size Estimates and Forecasts (2021-2032)
  4. 1.2.2 Global Dry Etching Equipment Sales Estimates and Forecasts (2021-2032)
  5. 1.3 Dry Etching Equipment Market by Type
  6. 1.3.1 Inductively Coupled Plasma (ICP)
  7. 1.3.2 Capacitive Coupled Plasma (CCP)
  8. 1.3.3 Reactive Ion Etching (RIE)
  9. 1.3.4 Deep Reactive Ion Etching (DRIE)
  10. 1.3.5 Others
  11. 1.4 Global Dry Etching Equipment Market Size by Type
  12. 1.4.1 Global Dry Etching Equipment Market Size Overview by Type (2021-2032)
  13. 1.4.2 Global Dry Etching Equipment Historic Market Size Review by Type (2021-2026)
  14. 1.4.3 Global Dry Etching Equipment Forecasted Market Size by Type (2027-2032)
  15. 1.5 Key Regions Market Size by Type
  16. 1.5.1 North America Dry Etching Equipment Sales Breakdown by Type (2021-2026)
  17. 1.5.2 Europe Dry Etching Equipment Sales Breakdown by Type (2021-2026)
  18. 1.5.3 Asia-Pacific Dry Etching Equipment Sales Breakdown by Type (2021-2026)
  19. 1.5.4 South America Dry Etching Equipment Sales Breakdown by Type (2021-2026)
  20. 1.5.5 Middle East and Africa Dry Etching Equipment Sales Breakdown by Type (2021-2026)
2 Global Market Dynamics
  1. 2.1 Dry Etching Equipment Industry Trends
  2. 2.2 Dry Etching Equipment Industry Drivers
  3. 2.3 Dry Etching Equipment Industry Opportunities and Challenges
  4. 2.4 Dry Etching Equipment Industry Restraints
3 Market Competitive Landscape by Company
  1. 3.1 Global Top Players by Dry Etching Equipment Revenue (2021-2026)
  2. 3.2 Global Top Players by Dry Etching Equipment Sales (2021-2026)
  3. 3.3 Global Top Players by Dry Etching Equipment Price (2021-2026)
  4. 3.4 Global Dry Etching Equipment Industry Company Ranking, 2024 VS 2025 VS 2026
  5. 3.5 Global Dry Etching Equipment Major Company Production Sites & Headquarters
  6. 3.6 Global Dry Etching Equipment Company, Product Type & Application
  7. 3.7 Global Dry Etching Equipment Company Establishment Date
  8. 3.8 Market Competitive Analysis
  9. 3.8.1 Global Dry Etching Equipment Market CR5 and HHI
  10. 3.8.2 Global Top 5 and 10 Dry Etching Equipment Players Market Share by Revenue in 2025
  11. 3.8.3 2025 Dry Etching Equipment Tier 1, Tier 2, and Tier 3
4 Dry Etching Equipment Regional Status and Outlook
  1. 4.1 Global Dry Etching Equipment Market Size and CAGR by Region: 2021 VS 2025 VS 2032
  2. 4.2 Global Dry Etching Equipment Historic Market Size by Region
  3. 4.2.1 Global Dry Etching Equipment Sales in Volume by Region (2021-2026)
  4. 4.2.2 Global Dry Etching Equipment Sales in Value by Region (2021-2026)
  5. 4.2.3 Global Dry Etching Equipment Sales (Volume & Value), Price and Gross Margin (2021-2026)
  6. 4.3 Global Dry Etching Equipment Forecasted Market Size by Region
  7. 4.3.1 Global Dry Etching Equipment Sales in Volume by Region (2027-2032)
  8. 4.3.2 Global Dry Etching Equipment Sales in Value by Region (2027-2032)
  9. 4.3.3 Global Dry Etching Equipment Sales (Volume & Value), Price and Gross Margin (2027-2032)
5 Dry Etching Equipment by Application
  1. 5.1 Dry Etching Equipment Market by Application
  2. 5.1.1 Logic and Memory
  3. 5.1.2 MEMS
  4. 5.1.3 Power Device
  5. 5.1.4 Others
  6. 5.2 Global Dry Etching Equipment Market Size by Application
  7. 5.2.1 Global Dry Etching Equipment Market Size Overview by Application (2021-2032)
  8. 5.2.2 Global Dry Etching Equipment Historic Market Size Review by Application (2021-2026)
  9. 5.2.3 Global Dry Etching Equipment Forecasted Market Size by Application (2027-2032)
  10. 5.3 Key Regions Market Size by Application
  11. 5.3.1 North America Dry Etching Equipment Sales Breakdown by Application (2021-2026)
  12. 5.3.2 Europe Dry Etching Equipment Sales Breakdown by Application (2021-2026)
  13. 5.3.3 Asia-Pacific Dry Etching Equipment Sales Breakdown by Application (2021-2026)
  14. 5.3.4 South America Dry Etching Equipment Sales Breakdown by Application (2021-2026)
  15. 5.3.5 Middle East and Africa Dry Etching Equipment Sales Breakdown by Application (2021-2026)
6 Company Profiles
  1. 6.1 Lam Research
  2. 6.1.1 Lam Research Company Information
  3. 6.1.2 Lam Research Business Overview
  4. 6.1.3 Lam Research Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  5. 6.1.4 Lam Research Dry Etching Equipment Product Portfolio
  6. 6.1.5 Lam Research Recent Developments
  7. 6.2 TEL
  8. 6.2.1 TEL Company Information
  9. 6.2.2 TEL Business Overview
  10. 6.2.3 TEL Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  11. 6.2.4 TEL Dry Etching Equipment Product Portfolio
  12. 6.2.5 TEL Recent Developments
  13. 6.3 Applied Materials
  14. 6.3.1 Applied Materials Company Information
  15. 6.3.2 Applied Materials Business Overview
  16. 6.3.3 Applied Materials Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  17. 6.3.4 Applied Materials Dry Etching Equipment Product Portfolio
  18. 6.3.5 Applied Materials Recent Developments
  19. 6.4 Hitachi High-Technologies
  20. 6.4.1 Hitachi High-Technologies Company Information
  21. 6.4.2 Hitachi High-Technologies Business Overview
  22. 6.4.3 Hitachi High-Technologies Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  23. 6.4.4 Hitachi High-Technologies Dry Etching Equipment Product Portfolio
  24. 6.4.5 Hitachi High-Technologies Recent Developments
  25. 6.5 Oxford Instruments
  26. 6.5.1 Oxford Instruments Company Information
  27. 6.5.2 Oxford Instruments Business Overview
  28. 6.5.3 Oxford Instruments Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  29. 6.5.4 Oxford Instruments Dry Etching Equipment Product Portfolio
  30. 6.5.5 Oxford Instruments Recent Developments
  31. 6.6 ULVAC
  32. 6.6.1 ULVAC Company Information
  33. 6.6.2 ULVAC Business Overview
  34. 6.6.3 ULVAC Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  35. 6.6.4 ULVAC Dry Etching Equipment Product Portfolio
  36. 6.6.5 ULVAC Recent Developments
  37. 6.7 SPTS Technologies
  38. 6.7.1 SPTS Technologies Company Information
  39. 6.7.2 SPTS Technologies Business Overview
  40. 6.7.3 SPTS Technologies Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  41. 6.7.4 SPTS Technologies Dry Etching Equipment Product Portfolio
  42. 6.7.5 SPTS Technologies Recent Developments
  43. 6.8 GigaLane
  44. 6.8.1 GigaLane Company Information
  45. 6.8.2 GigaLane Business Overview
  46. 6.8.3 GigaLane Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  47. 6.8.4 GigaLane Dry Etching Equipment Product Portfolio
  48. 6.8.5 GigaLane Recent Developments
  49. 6.9 Plasma-Therm
  50. 6.9.1 Plasma-Therm Company Information
  51. 6.9.2 Plasma-Therm Business Overview
  52. 6.9.3 Plasma-Therm Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  53. 6.9.4 Plasma-Therm Dry Etching Equipment Product Portfolio
  54. 6.9.5 Plasma-Therm Recent Developments
  55. 6.10 SAMCO
  56. 6.10.1 SAMCO Company Information
  57. 6.10.2 SAMCO Business Overview
  58. 6.10.3 SAMCO Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  59. 6.10.4 SAMCO Dry Etching Equipment Product Portfolio
  60. 6.10.5 SAMCO Recent Developments
  61. 6.11 AMEC
  62. 6.11.1 AMEC Company Information
  63. 6.11.2 AMEC Business Overview
  64. 6.11.3 AMEC Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  65. 6.11.4 AMEC Dry Etching Equipment Product Portfolio
  66. 6.11.5 AMEC Recent Developments
  67. 6.12 NAURA
  68. 6.12.1 NAURA Company Information
  69. 6.12.2 NAURA Business Overview
  70. 6.12.3 NAURA Dry Etching Equipment Sales, Revenue and Gross Margin (2021-2026)
  71. 6.12.4 NAURA Dry Etching Equipment Product Portfolio
  72. 6.12.5 NAURA Recent Developments
7 North America by Country
  1. 7.1 North America Dry Etching Equipment Sales by Country
  2. 7.1.1 North America Dry Etching Equipment Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
  3. 7.1.2 North America Dry Etching Equipment Sales by Country (2021-2026)
  4. 7.1.3 North America Dry Etching Equipment Sales Forecast by Country (2027-2032)
  5. 7.2 North America Dry Etching Equipment Market Size by Country
  6. 7.2.1 North America Dry Etching Equipment Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
  7. 7.2.2 North America Dry Etching Equipment Market Size by Country (2021-2026)
  8. 7.2.3 North America Dry Etching Equipment Market Size Forecast by Country (2027-2032)
8 Europe by Country
  1. 8.1 Europe Dry Etching Equipment Sales by Country
  2. 8.1.1 Europe Dry Etching Equipment Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
  3. 8.1.2 Europe Dry Etching Equipment Sales by Country (2021-2026)
  4. 8.1.3 Europe Dry Etching Equipment Sales Forecast by Country (2027-2032)
  5. 8.2 Europe Dry Etching Equipment Market Size by Country
  6. 8.2.1 Europe Dry Etching Equipment Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
  7. 8.2.2 Europe Dry Etching Equipment Market Size by Country (2021-2026)
  8. 8.2.3 Europe Dry Etching Equipment Market Size Forecast by Country (2027-2032)
9 Asia-Pacific by Country
  1. 9.1 Asia-Pacific Dry Etching Equipment Sales by Country
  2. 9.1.1 Asia-Pacific Dry Etching Equipment Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
  3. 9.1.2 Asia-Pacific Dry Etching Equipment Sales by Country (2021-2026)
  4. 9.1.3 Asia-Pacific Dry Etching Equipment Sales Forecast by Country (2027-2032)
  5. 9.2 Asia-Pacific Dry Etching Equipment Market Size by Country
  6. 9.2.1 Asia-Pacific Dry Etching Equipment Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
  7. 9.2.2 Asia-Pacific Dry Etching Equipment Market Size by Country (2021-2026)
  8. 9.2.3 Asia-Pacific Dry Etching Equipment Market Size Forecast by Country (2027-2032)
10 South America by Country
  1. 10.1 South America Dry Etching Equipment Sales by Country
  2. 10.1.1 South America Dry Etching Equipment Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
  3. 10.1.2 South America Dry Etching Equipment Sales by Country (2021-2026)
  4. 10.1.3 South America Dry Etching Equipment Sales Forecast by Country (2027-2032)
  5. 10.2 South America Dry Etching Equipment Market Size by Country
  6. 10.2.1 South America Dry Etching Equipment Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
  7. 10.2.2 South America Dry Etching Equipment Market Size by Country (2021-2026)
  8. 10.2.3 South America Dry Etching Equipment Market Size Forecast by Country (2027-2032)
11 Middle East and Africa by Country
  1. 11.1 Middle East and Africa Dry Etching Equipment Sales by Country
  2. 11.1.1 Middle East and Africa Dry Etching Equipment Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
  3. 11.1.2 Middle East and Africa Dry Etching Equipment Sales by Country (2021-2026)
  4. 11.1.3 Middle East and Africa Dry Etching Equipment Sales Forecast by Country (2027-2032)
  5. 11.2 Middle East and Africa Dry Etching Equipment Market Size by Country
  6. 11.2.1 Middle East and Africa Dry Etching Equipment Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
  7. 11.2.2 Middle East and Africa Dry Etching Equipment Market Size by Country (2021-2026)
  8. 11.2.3 Middle East and Africa Dry Etching Equipment Market Size Forecast by Country (2027-2032)
12 Value Chain and Sales Channels Analysis
  1. 12.1 Dry Etching Equipment Value Chain Analysis
  2. 12.1.1 Dry Etching Equipment Key Raw Materials
  3. 12.1.2 Key Raw Materials Price
  4. 12.1.3 Raw Materials Key Suppliers
  5. 12.1.4 Manufacturing Cost Structure
  6. 12.1.5 Dry Etching Equipment Production Mode & Process
  7. 12.2 Dry Etching Equipment Sales Channels Analysis
  8. 12.2.1 Direct Comparison with Distribution Share
  9. 12.2.2 Dry Etching Equipment Distributors
  10. 12.2.3 Dry Etching Equipment Customers
13 Concluding Insights
    14 Appendix
    1. 14.1 Reasons for Doing This Study
    2. 14.2 Research Methodology
    3. 14.3 Research Process
    4. 14.4 Authors List of This Report
    5. 14.5 Data Source
    6. 14.5.1 Secondary Sources
    7. 14.5.2 Primary Sources
    8. 14.6 Disclaimer

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