APO RESEARCH · REPORT
Dry Etching Equipment
Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.
Product & engineering
Understand the product.
Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.
Selected research
Market Analysis & Forecast
Global Dry Etching Equipment Market Analysis and Forecast 2026-2032
Market perspective
Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.
Currently, global production of Dry Etching Equipment is concentrated. The top three manufacturers held 92.16% of the market, in terms of Dry Etching Equipment sales value in 2019.
As for the region, APAC is the largest consumption region, holding 76.07% sales revenue market share in 2019, followed by North America, with 13% market share.
Read the full market overview
This report presents an overview of global market for Dry Etching Equipment, capacity, output, revenue and price. Analyses of the global market trends, with historic market revenue or sales data for 2021 - 2025, estimates for 2026, and projections of CAGR through 2032.
This report researches the key producers of Dry Etching Equipment, also provides the consumption of main regions and countries. Of the upcoming market potential for Dry Etching Equipment, and key regions or countries of focus to forecast this market into various segments and sub-segments. Country specific data and market value analysis for the U.S., Canada, Mexico, Brazil, China, Japan, South Korea, Southeast Asia, India, Germany, the U.K., Italy, Middle East, Africa, and Other Countries.
This report focuses on the Dry Etching Equipment sales, revenue, market share and industry ranking of main manufacturers, data from 2021 to 2026. Identification of the major stakeholders in the global Dry Etching Equipment market, and analysis of their competitive landscape and market positioning based on recent developments and segmental revenues. This report will help stakeholders to understand the competitive landscape and gain more insights and position their businesses and market strategies in a better way.
This report analyzes the segments data by Type and by Application, sales, revenue, and price, from 2021 to 2032. Evaluation and forecast the market size for Dry Etching Equipment sales, projected growth trends, production technology, application and end-user industry.
Dry Etching Equipment Segment by Company
Lam Research
TEL
Applied Materials
Hitachi High-Technologies
Oxford Instruments
ULVAC
SPTS Technologies
GigaLane
Plasma-Therm
SAMCO
AMEC
NAURA
Dry Etching Equipment Segment by Type
Inductively Coupled Plasma (ICP)
Capacitive Coupled Plasma (CCP)
Reactive Ion Etching (RIE)
Deep Reactive Ion Etching (DRIE)
Others
Dry Etching Equipment Segment by Application
Logic and Memory
MEMS
Power Device
Others
Dry Etching Equipment Segment by Region
North America
United States
Canada
Mexico
Europe
Germany
France
U.K.
Italy
Russia
Spain
Netherlands
Switzerland
Sweden
Poland
Asia-Pacific
China
Japan
South Korea
India
Australia
Taiwan
Southeast Asia
South America
Brazil
Argentina
Chile
Middle East & Africa
Egypt
South Africa
Israel
Türkiye
GCC Countries
Study Objectives
1. To analyze and research the global status and future forecast, involving, production, value, consumption, growth rate (CAGR), market share, historical and forecast.
2. To present the key manufacturers, capacity, production, revenue, market share, and Recent Developments.
3. To split the breakdown data by regions, type, manufacturers, and Application.
4. To analyze the global and key regions market potential and advantage, opportunity and challenge, restraints, and risks.
5. To identify significant trends, drivers, influence factors in global and regions.
6. To analyze competitive developments such as expansions, agreements, new product launches, and acquisitions in the market.
Reasons to Buy This Report
1. This report will help the readers to understand the competition within the industries and strategies for the competitive environment to enhance the potential profit. The report also focuses on the competitive landscape of the global Dry Etching Equipment market, and introduces in detail the market share, industry ranking, competitor ecosystem, market performance, new product development, operation situation, expansion, and acquisition. etc. of the main players, which helps the readers to identify the main competitors and deeply understand the competition pattern of the market.
2. This report will help stakeholders to understand the global industry status and trends of Dry Etching Equipment and provides them with information on key market drivers, restraints, challenges, and opportunities.
3. This report will help stakeholders to understand competitors better and gain more insights to strengthen their position in their businesses. The competitive landscape section includes the market share and rank (in volume and value), competitor ecosystem, new product development, expansion, and acquisition.
4. This report stays updated with novel technology integration, features, and the latest developments in the market.
5. This report helps stakeholders to gain insights into which regions to target globally.
6. This report helps stakeholders to gain insights into the end-user perception concerning the adoption of Dry Etching Equipment.
7. This report helps stakeholders to identify some of the key players in the market and understand their valuable contribution.
Chapter Outline
Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by type and by application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
Chapter 2: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 3: Dry Etching Equipment production/output of global and key producers (regions/countries). It provides a quantitative analysis of the production, and development potential of each producer in the next six years.
Chapter 4: Sales (consumption), revenue of Dry Etching Equipment in global, regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space of each country in the world.
Chapter 5: Detailed analysis of Dry Etching Equipment manufacturers competitive landscape, price, sales, revenue, market share and industry ranking, latest development plan, merger, and acquisition information, etc.
Chapter 6: Provides the analysis of various market segments by type, covering the sales, revenue, average price, and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 7: Provides the analysis of various market segments by application, covering the sales, revenue, average price, and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 8: Provides profiles of key manufacturers, introducing the basic situation of the main companies in the market in detail, including product descriptions and specifications, Dry Etching Equipment sales, revenue, price, gross margin, and recent development, etc.
Chapter 9: North America by type, by application and by country, sales, and revenue for each segment.
Chapter 10: Europe by type, by application and by country, sales, and revenue for each segment.
Chapter 11: China by type, by application, sales, and revenue for each segment.
Chapter 12: Asia (Excluding China) by type, by application and by region, sales, and revenue for each segment.
Chapter 13: South America, Middle East and Africa by type, by application and by country, sales, and revenue for each segment.
Chapter 14: Analysis of industrial chain, sales channel, key raw materials, distributors and customers.
Chapter 15: The main concluding insights of the report.
More report detail
Tables and figures
Scope & coverage.
Types
- Inductively Coupled Plasma (ICP)
- Capacitive Coupled Plasma (CCP)
- Reactive Ion Etching (RIE)
- Deep Reactive Ion Etching (DRIE)
- Others
Applications
- Logic and Memory
- MEMS
- Power Device
- Others
Companies covered
- Lam Research
- TEL
- Applied Materials
- Hitachi High-Technologies
- Oxford Instruments
- ULVAC
- SPTS Technologies
- GigaLane
- Plasma-Therm
- SAMCO
- AMEC
- NAURA
Inside the report.
1 Market Overview
- 1.1 Product Definition
- 1.2 Dry Etching Equipment Market by Type
- 1.2.1 Global Dry Etching Equipment Market Size by Type, 2021 VS 2025 VS 2032
- 1.2.2 Inductively Coupled Plasma (ICP)
- 1.2.3 Capacitive Coupled Plasma (CCP)
- 1.2.4 Reactive Ion Etching (RIE)
- 1.2.5 Deep Reactive Ion Etching (DRIE)
- 1.2.6 Others
- 1.3 Dry Etching Equipment Market by Application
- 1.3.1 Global Dry Etching Equipment Market Size by Application, 2021 VS 2025 VS 2032
- 1.3.2 Logic and Memory
- 1.3.3 MEMS
- 1.3.4 Power Device
- 1.3.5 Others
- 1.4 Assumptions and Limitations
- 1.5 Study Goals and Objectives
2 Dry Etching Equipment Market Dynamics
- 2.1 Dry Etching Equipment Industry Trends
- 2.2 Dry Etching Equipment Industry Drivers
- 2.3 Dry Etching Equipment Industry Opportunities and Challenges
- 2.4 Dry Etching Equipment Industry Restraints
3 Global Dry Etching Equipment Production Overview
- 3.1 Global Dry Etching Equipment Production Capacity (2021-2032)
- 3.2 Global Dry Etching Equipment Production by Region: 2021 VS 2025 VS 2032
- 3.3 Global Dry Etching Equipment Production by Region
- 3.3.1 Global Dry Etching Equipment Production by Region (2021-2026)
- 3.3.2 Global Dry Etching Equipment Production by Region (2027-2032)
- 3.3.3 Global Dry Etching Equipment Production Market Share by Region (2021-2032)
- 3.4 North America
- 3.5 Europe
- 3.6 China
- 3.7 Japan
- 3.8 South Korea
4 Global Market Growth Prospects
- 4.1 Global Dry Etching Equipment Revenue Estimates and Forecasts (2021-2032)
- 4.2 Global Dry Etching Equipment Revenue by Region
- 4.2.1 Global Dry Etching Equipment Revenue by Region: 2021 VS 2025 VS 2032
- 4.2.2 Global Dry Etching Equipment Revenue by Region (2021-2026)
- 4.2.3 Global Dry Etching Equipment Revenue by Region (2027-2032)
- 4.2.4 Global Dry Etching Equipment Revenue Market Share by Region (2021-2032)
- 4.3 Global Dry Etching Equipment Sales Estimates and Forecasts 2021-2032
- 4.4 Global Dry Etching Equipment Sales by Region
- 4.4.1 Global Dry Etching Equipment Sales by Region: 2021 VS 2025 VS 2032
- 4.4.2 Global Dry Etching Equipment Sales by Region (2021-2026)
- 4.4.3 Global Dry Etching Equipment Sales by Region (2027-2032)
- 4.4.4 Global Dry Etching Equipment Sales Market Share by Region (2021-2032)
- 4.5 North America
- 4.6 Europe
- 4.7 China
- 4.8 Asia (Excluding China)
- 4.9 South America, Middle East and Africa
5 Market Competitive Landscape by Manufacturers
- 5.1 Global Dry Etching Equipment Revenue by Manufacturers
- 5.1.1 Global Dry Etching Equipment Revenue by Manufacturers (2021-2026)
- 5.1.2 Global Dry Etching Equipment Revenue Market Share by Manufacturers (2021-2026)
- 5.1.3 Global Dry Etching Equipment Manufacturers Revenue Share Top 10 and Top 5 in 2025
- 5.2 Global Dry Etching Equipment Sales by Manufacturers
- 5.2.1 Global Dry Etching Equipment Sales by Manufacturers (2021-2026)
- 5.2.2 Global Dry Etching Equipment Sales Market Share by Manufacturers (2021-2026)
- 5.2.3 Global Dry Etching Equipment Manufacturers Sales Share Top 10 and Top 5 in 2025
- 5.3 Global Dry Etching Equipment Sales Price by Manufacturers (2021-2026)
- 5.4 Global Dry Etching Equipment Key Manufacturers Ranking, 2024 VS 2025 VS 2026
- 5.5 Global Dry Etching Equipment Key Manufacturers Manufacturing Sites & Headquarters
- 5.6 Global Dry Etching Equipment Manufacturers, Product Type & Application
- 5.7 Global Dry Etching Equipment Manufacturers Commercialization Time
- 5.8 Market Competitive Analysis
- 5.8.1 Global Dry Etching Equipment Market CR5 and HHI
- 5.8.2 2025 Dry Etching Equipment Tier 1, Tier 2, and Tier 3
6 Dry Etching Equipment Market by Type
- 6.1 Global Dry Etching Equipment Revenue by Type
- 6.1.1 Global Dry Etching Equipment Revenue by Type (2021-2032) & (US$ Million)
- 6.1.2 Global Dry Etching Equipment Revenue Market Share by Type (2021-2032)
- 6.2 Global Dry Etching Equipment Sales by Type
- 6.2.1 Global Dry Etching Equipment Sales by Type (2021-2032) & (Units)
- 6.2.2 Global Dry Etching Equipment Sales Market Share by Type (2021-2032)
- 6.3 Global Dry Etching Equipment Price by Type
7 Dry Etching Equipment Market by Application
- 7.1 Global Dry Etching Equipment Revenue by Application
- 7.1.1 Global Dry Etching Equipment Revenue by Application (2021-2032) & (US$ Million)
- 7.1.2 Global Dry Etching Equipment Revenue Market Share by Application (2021-2032)
- 7.2 Global Dry Etching Equipment Sales by Application
- 7.2.1 Global Dry Etching Equipment Sales by Application (2021-2032) & (Units)
- 7.2.2 Global Dry Etching Equipment Sales Market Share by Application (2021-2032)
- 7.3 Global Dry Etching Equipment Price by Application
8 Company Profiles
- 8.1 Lam Research
- 8.1.1 Lam Research Company Information
- 8.1.2 Lam Research Business Overview
- 8.1.3 Lam Research Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.1.4 Lam Research Dry Etching Equipment Product Portfolio
- 8.1.5 Lam Research Recent Developments
- 8.2 TEL
- 8.2.1 TEL Company Information
- 8.2.2 TEL Business Overview
- 8.2.3 TEL Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.2.4 TEL Dry Etching Equipment Product Portfolio
- 8.2.5 TEL Recent Developments
- 8.3 Applied Materials
- 8.3.1 Applied Materials Company Information
- 8.3.2 Applied Materials Business Overview
- 8.3.3 Applied Materials Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.3.4 Applied Materials Dry Etching Equipment Product Portfolio
- 8.3.5 Applied Materials Recent Developments
- 8.4 Hitachi High-Technologies
- 8.4.1 Hitachi High-Technologies Company Information
- 8.4.2 Hitachi High-Technologies Business Overview
- 8.4.3 Hitachi High-Technologies Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.4.4 Hitachi High-Technologies Dry Etching Equipment Product Portfolio
- 8.4.5 Hitachi High-Technologies Recent Developments
- 8.5 Oxford Instruments
- 8.5.1 Oxford Instruments Company Information
- 8.5.2 Oxford Instruments Business Overview
- 8.5.3 Oxford Instruments Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.5.4 Oxford Instruments Dry Etching Equipment Product Portfolio
- 8.5.5 Oxford Instruments Recent Developments
- 8.6 ULVAC
- 8.6.1 ULVAC Company Information
- 8.6.2 ULVAC Business Overview
- 8.6.3 ULVAC Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.6.4 ULVAC Dry Etching Equipment Product Portfolio
- 8.6.5 ULVAC Recent Developments
- 8.7 SPTS Technologies
- 8.7.1 SPTS Technologies Company Information
- 8.7.2 SPTS Technologies Business Overview
- 8.7.3 SPTS Technologies Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.7.4 SPTS Technologies Dry Etching Equipment Product Portfolio
- 8.7.5 SPTS Technologies Recent Developments
- 8.8 GigaLane
- 8.8.1 GigaLane Company Information
- 8.8.2 GigaLane Business Overview
- 8.8.3 GigaLane Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.8.4 GigaLane Dry Etching Equipment Product Portfolio
- 8.8.5 GigaLane Recent Developments
- 8.9 Plasma-Therm
- 8.9.1 Plasma-Therm Company Information
- 8.9.2 Plasma-Therm Business Overview
- 8.9.3 Plasma-Therm Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.9.4 Plasma-Therm Dry Etching Equipment Product Portfolio
- 8.9.5 Plasma-Therm Recent Developments
- 8.10 SAMCO
- 8.10.1 SAMCO Company Information
- 8.10.2 SAMCO Business Overview
- 8.10.3 SAMCO Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.10.4 SAMCO Dry Etching Equipment Product Portfolio
- 8.10.5 SAMCO Recent Developments
- 8.11 AMEC
- 8.11.1 AMEC Company Information
- 8.11.2 AMEC Business Overview
- 8.11.3 AMEC Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.11.4 AMEC Dry Etching Equipment Product Portfolio
- 8.11.5 AMEC Recent Developments
- 8.12 NAURA
- 8.12.1 NAURA Company Information
- 8.12.2 NAURA Business Overview
- 8.12.3 NAURA Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2021-2026)
- 8.12.4 NAURA Dry Etching Equipment Product Portfolio
- 8.12.5 NAURA Recent Developments
9 North America
- 9.1 North America Dry Etching Equipment Market Size by Type
- 9.1.1 North America Dry Etching Equipment Revenue by Type (2021-2032)
- 9.1.2 North America Dry Etching Equipment Sales by Type (2021-2032)
- 9.1.3 North America Dry Etching Equipment Price by Type (2021-2032)
- 9.2 North America Dry Etching Equipment Market Size by Application
- 9.2.1 North America Dry Etching Equipment Revenue by Application (2021-2032)
- 9.2.2 North America Dry Etching Equipment Sales by Application (2021-2032)
- 9.2.3 North America Dry Etching Equipment Price by Application (2021-2032)
- 9.3 North America Dry Etching Equipment Market Size by Country
- 9.3.1 North America Dry Etching Equipment Revenue Grow Rate by Country (2021 VS 2025 VS 2032)
- 9.3.2 North America Dry Etching Equipment Sales by Country (2021 VS 2025 VS 2032)
- 9.3.3 North America Dry Etching Equipment Price by Country (2021-2032)
- 9.3.4 United States
- 9.3.5 Canada
- 9.3.6 Mexico
10 Europe
- 10.1 Europe Dry Etching Equipment Market Size by Type
- 10.1.1 Europe Dry Etching Equipment Revenue by Type (2021-2032)
- 10.1.2 Europe Dry Etching Equipment Sales by Type (2021-2032)
- 10.1.3 Europe Dry Etching Equipment Price by Type (2021-2032)
- 10.2 Europe Dry Etching Equipment Market Size by Application
- 10.2.1 Europe Dry Etching Equipment Revenue by Application (2021-2032)
- 10.2.2 Europe Dry Etching Equipment Sales by Application (2021-2032)
- 10.2.3 Europe Dry Etching Equipment Price by Application (2021-2032)
- 10.3 Europe Dry Etching Equipment Market Size by Country
- 10.3.1 Europe Dry Etching Equipment Revenue Grow Rate by Country (2021 VS 2025 VS 2032)
- 10.3.2 Europe Dry Etching Equipment Sales by Country (2021 VS 2025 VS 2032)
- 10.3.3 Europe Dry Etching Equipment Price by Country (2021-2032)
- 10.3.4 Germany
- 10.3.5 France
- 10.3.6 U.K.
- 10.3.7 Italy
- 10.3.8 Russia
- 10.3.9 Spain
- 10.3.10 Netherlands
- 10.3.11 Switzerland
- 10.3.12 Sweden
11 China
- 11.1 China Dry Etching Equipment Market Size by Type
- 11.1.1 China Dry Etching Equipment Revenue by Type (2021-2032)
- 11.1.2 China Dry Etching Equipment Sales by Type (2021-2032)
- 11.1.3 China Dry Etching Equipment Price by Type (2021-2032)
- 11.2 China Dry Etching Equipment Market Size by Application
- 11.2.1 China Dry Etching Equipment Revenue by Application (2021-2032)
- 11.2.2 China Dry Etching Equipment Sales by Application (2021-2032)
- 11.2.3 China Dry Etching Equipment Price by Application (2021-2032)
12 Asia (Excluding China)
- 12.1 Asia Dry Etching Equipment Market Size by Type
- 12.1.1 Asia Dry Etching Equipment Revenue by Type (2021-2032)
- 12.1.2 Asia Dry Etching Equipment Sales by Type (2021-2032)
- 12.1.3 Asia Dry Etching Equipment Price by Type (2021-2032)
- 12.2 Asia Dry Etching Equipment Market Size by Application
- 12.2.1 Asia Dry Etching Equipment Revenue by Application (2021-2032)
- 12.2.2 Asia Dry Etching Equipment Sales by Application (2021-2032)
- 12.2.3 Asia Dry Etching Equipment Price by Application (2021-2032)
- 12.3 Asia Dry Etching Equipment Market Size by Country
- 12.3.1 Asia Dry Etching Equipment Revenue Grow Rate by Country (2021 VS 2025 VS 2032)
- 12.3.2 Asia Dry Etching Equipment Sales by Country (2021 VS 2025 VS 2032)
- 12.3.3 Asia Dry Etching Equipment Price by Country (2021-2032)
- 12.3.4 Japan
- 12.3.5 South Korea
- 12.3.6 India
- 12.3.7 Australia
- 12.3.8 Taiwan
- 12.3.9 Southeast Asia
13 South America, Middle East and Africa
- 13.1 SAMEA Dry Etching Equipment Market Size by Type
- 13.1.1 SAMEA Dry Etching Equipment Revenue by Type (2021-2032)
- 13.1.2 SAMEA Dry Etching Equipment Sales by Type (2021-2032)
- 13.1.3 SAMEA Dry Etching Equipment Price by Type (2021-2032)
- 13.2 SAMEA Dry Etching Equipment Market Size by Application
- 13.2.1 SAMEA Dry Etching Equipment Revenue by Application (2021-2032)
- 13.2.2 SAMEA Dry Etching Equipment Sales by Application (2021-2032)
- 13.2.3 SAMEA Dry Etching Equipment Price by Application (2021-2032)
- 13.3 SAMEA Dry Etching Equipment Market Size by Country
- 13.3.1 SAMEA Dry Etching Equipment Revenue Grow Rate by Country (2021 VS 2025 VS 2032)
- 13.3.2 SAMEA Dry Etching Equipment Sales by Country (2021 VS 2025 VS 2032)
- 13.3.3 SAMEA Dry Etching Equipment Price by Country (2021-2032)
- 13.3.4 Brazil
- 13.3.5 Argentina
- 13.3.6 Chile
- 13.3.7 Colombia
- 13.3.8 Peru
- 13.3.9 Saudi Arabia
- 13.3.10 Israel
- 13.3.11 UAE
- 13.3.12 Turkey
- 13.3.13 Iran
- 13.3.14 Egypt
14 Value Chain and Sales Channels Analysis
- 14.1 Dry Etching Equipment Value Chain Analysis
- 14.1.1 Dry Etching Equipment Key Raw Materials
- 14.1.2 Raw Materials Key Suppliers
- 14.1.3 Manufacturing Cost Structure
- 14.1.4 Dry Etching Equipment Production Mode & Process
- 14.2 Dry Etching Equipment Sales Channels Analysis
- 14.2.1 Direct Comparison with Distribution Share
- 14.2.2 Dry Etching Equipment Distributors
- 14.2.3 Dry Etching Equipment Customers
15 Concluding Insights
16 Appendix
- 16.1 Reasons for Doing This Study
- 16.2 Research Methodology
- 16.3 Research Process
- 16.4 Authors List of This Report
- 16.5 Data Source
- 16.5.1 Secondary Sources
- 16.5.2 Primary Sources
- 16.6 Disclaimer
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