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Dry Etching Equipment

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.

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Product & engineering

Understand the product.

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.

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Market Structure

Global Dry Etching Equipment Market by Size, by Type, by Application, by Region, History and Forecast 2021-2032

28 December 2025199 pages

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Industry ResearchDry Etching Equipment Industry Research Report 2026121 pages · $2,950 USDIndustry Growth & TrendsGlobal Dry Etching Equipment Industry Growth and Trends Forecast to 2032106 pages · $3,450 USDMarket StructureGlobal Dry Etching Equipment Market by Size, by Type, by Application, by Region, History and Forecast 2021-2032199 pages · $3,950 USDMarket Outlook & Growth OpportunitiesGlobal Dry Etching Equipment Market Outlook and Growth Opportunities 2026199 pages · $4,250 USDMarket Analysis & ForecastGlobal Dry Etching Equipment Market Analysis and Forecast 2026-2032216 pages · $4,950 USD

Market perspective

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.

Currently, global production of Dry Etching Equipment is concentrated. The top three manufacturers held 92.16% of the market, in terms of Dry Etching Equipment sales value in 2019.

As for the region, APAC is the largest consumption region, holding 76.07% sales revenue market share in 2019, followed by North America, with 13% market share.

Read the full market overview

The report provides an overview of the global Dry Etching Equipment market in terms of capacity, output, revenue, and price, analyzing global market trends using historical revenue and sales data for 2021-2025, estimates for 2026, and projected CAGRs through 2032.

The study covers key producers of Dry Etching Equipment and consumption patterns in major regions and countries, assesses future market potential, and highlights priority regions and countries for segmenting the market into sub-sectors, with country-specific market value data for the U.S., Canada, Mexico, Brazil, China, Japan, South Korea, Southeast Asia, India, Germany, the U.K., Italy, the Middle East, Africa, and other countries.

The report also presents Dry Etching Equipment sales, revenue, market share, and industry ranking for the main manufacturers for 2021-2026, identifies the major stakeholders in the global market, and analyzes their competitive landscape and market positioning based on recent developments and segmental revenues.

In addition, the report analyzes segment data by type and application—covering sales, revenue, and price—for 2021-2032, and evaluates and forecasts the Dry Etching Equipment market size, projected growth trends, production technologies, key applications, and end-use industries.

Dry Etching Equipment Segment by Company

Lam Research

TEL

Applied Materials

Hitachi High-Technologies

Oxford Instruments

ULVAC

SPTS Technologies

GigaLane

Plasma-Therm

SAMCO

AMEC

NAURA

Dry Etching Equipment Segment by Type

Inductively Coupled Plasma (ICP)

Capacitive Coupled Plasma (CCP)

Reactive Ion Etching (RIE)

Deep Reactive Ion Etching (DRIE)

Others

Dry Etching Equipment Segment by Application

Logic and Memory

MEMS

Power Device

Others

Dry Etching Equipment Segment by Region

North America

United States

Canada

Mexico

Europe

Germany

France

U.K.

Italy

Russia

Spain

Netherlands

Switzerland

Sweden

Poland

Asia-Pacific

China

Japan

South Korea

India

Australia

Taiwan

Southeast Asia

South America

Brazil

Argentina

Chile

Middle East & Africa

Egypt

South Africa

Israel

Türkiye

GCC Countries

Study Objectives

1. To analyze and research the global status and future forecast, involving, production, value, consumption, growth rate (CAGR), market share, historical and forecast.

2. To present the key manufacturers, capacity, production, revenue, market share, and Recent Developments.

3. To split the breakdown data by regions, type, manufacturers, and Application.

4. To analyze the global and key regions market potential and advantage, opportunity and challenge, restraints, and risks.

5. To identify significant trends, drivers, influence factors in global and regions.

6. To analyze competitive developments such as expansions, agreements, new product launches, and acquisitions in the market.

Reasons to Buy This Report

1. This report will help the readers to understand the competition within the industries and strategies for the competitive environment to enhance the potential profit. The report also focuses on the competitive landscape of the global Dry Etching Equipment market, and introduces in detail the market share, industry ranking, competitor ecosystem, market performance, new product development, operation situation, expansion, and acquisition. etc. of the main players, which helps the readers to identify the main competitors and deeply understand the competition pattern of the market.

2. This report will help stakeholders to understand the global industry status and trends of Dry Etching Equipment and provides them with information on key market drivers, restraints, challenges, and opportunities.

3. This report will help stakeholders to understand competitors better and gain more insights to strengthen their position in their businesses. The competitive landscape section includes the market share and rank (in volume and value), competitor ecosystem, new product development, expansion, and acquisition.

4. This report stays updated with novel technology integration, features, and the latest developments in the market.

5. This report helps stakeholders to gain insights into which regions to target globally.

6. This report helps stakeholders to gain insights into the end-user perception concerning the adoption of Dry Etching Equipment.

7. This report helps stakeholders to identify some of the key players in the market and understand their valuable contribution.

Chapter Outline

Chapter 1: Provides an overview of the Dry Etching Equipment market, including product definition, global market growth prospects, production value, capacity, and average price forecasts (2021-2032).

Chapter 2: Analysis key trends, drivers, challenges, and opportunities within the global Dry Etching Equipment industry.

Chapter 3: Detailed analysis of Dry Etching Equipment market competition landscape. Including Dry Etching Equipment manufacturers' output value, output and average price from 2021 to 2026, as well as competition analysis indicators such as origin, product type, application, merger and acquisition information, etc.

Chapter 4: Provides the analysis of various market segments by type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.

Chapter 5: Provides the analysis of various market segments by application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.

Chapter 6: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.

Chapter 7: Production/Production Value of Dry Etching Equipment by region. It provides a quantitative analysis of the market size and development potential of each region in the next six years.

Chapter 8: Consumption of Dry Etching Equipment in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.

Chapter 9: Analysis of industrial chain, including the upstream and downstream of the industry.

Chapter 10: Concluding Insights of the report.

More report detail

Tables and figures
List of Tables Table 1. Dry Etching Equipment Industry Trends Table 2. Dry Etching Equipment Industry Drivers Table 3. Dry Etching Equipment Industry Opportunities and Challenges Table 4. Dry Etching Equipment Industry Restraints Table 5. Global Dry Etching Equipment Production Value by Manufacturers (US$ Million) & (2021-2026) Table 6. Global Dry Etching Equipment Production Value Share by Manufacturers (2021-2026) Table 7. Global Dry Etching Equipment Production by Manufacturers (Units) & (2021-2026) Table 8. Global Dry Etching Equipment Production Market Share by Manufacturers Table 9. Global Dry Etching Equipment Average Price (K USD/Unit) of Manufacturers (2021-2026) Table 10. Global Dry Etching Equipment Industry Manufacturers Ranking, 2024 VS 2025 VS 2026 Table 11. Global Dry Etching Equipment Key Manufacturers Manufacturing Sites & Headquarters Table 12. Global Dry Etching Equipment Manufacturers, Product Type & Application Table 13. Global Dry Etching Equipment Manufacturers Established Date Table 14. Global Manufacturers Market Concentration Ratio (CR5 and HHI) Table 15. Global Dry Etching Equipment by Manufacturers Type (Tier 1, Tier 2, and Tier 3) & (based on the Production Value of 2025) Table 16. Major Manufacturers of Inductively Coupled Plasma (ICP) Table 17. Major Manufacturers of Capacitive Coupled Plasma (CCP) Table 18. Major Manufacturers of Reactive Ion Etching (RIE) Table 19. Major Manufacturers of Deep Reactive Ion Etching (DRIE) Table 20. Major Manufacturers of Others Table 21. Global Dry Etching Equipment Production by Type 2021 VS 2025 VS 2032 (Units) Table 22. Global Dry Etching Equipment Production by Type (2021-2026) & (Units) Table 23. Global Dry Etching Equipment Production by Type (2027-2032) & (Units) Table 24. Global Dry Etching Equipment Production Market Share by Type (2021-2026) Table 25. Global Dry Etching Equipment Production Market Share by Type (2027-2032) Table 26. Global Dry Etching Equipment Production Value by Type 2021 VS 2025 VS 2032 (Units) Table 27. Global Dry Etching Equipment Production Value by Type (2021-2026) & (Units) Table 28. Global Dry Etching Equipment Production Value by Type (2027-2032) & (Units) Table 29. Global Dry Etching Equipment Production Value Market Share by Type (2021-2026) Table 30. Global Dry Etching Equipment Production Value Market Share by Type (2027-2032) Table 31. Major Manufacturers of Logic and Memory Table 32. Major Manufacturers of MEMS Table 33. Major Manufacturers of Power Device Table 34. Major Manufacturers of Others Table 35. Global Dry Etching Equipment Production by Application 2021 VS 2025 VS 2032 (Units) Table 36. Global Dry Etching Equipment Production by Application (2021-2026) & (Units) Table 37. Global Dry Etching Equipment Production by Application (2027-2032) & (Units) Table 38. Global Dry Etching Equipment Production Market Share by Application (2021-2026) Table 39. Global Dry Etching Equipment Production Market Share by Application (2027-2032) Table 40. Global Dry Etching Equipment Production Value by Application 2021 VS 2025 VS 2032 (Units) Table 41. Global Dry Etching Equipment Production Value by Application (2021-2026) & (Units) Table 42. Global Dry Etching Equipment Production Value by Application (2027-2032) & (Units) Table 43. Global Dry Etching Equipment Production Value Market Share by Application (2021-2026) Table 44. Global Dry Etching Equipment Production Value Market Share by Application (2027-2032) Table 45. Lam Research Company Information Table 46. Lam Research Business Overview Table 47. Lam Research Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 48. Lam Research Dry Etching Equipment Product Portfolio Table 49. Lam Research Recent Development Table 50. TEL Company Information Table 51. TEL Business Overview Table 52. TEL Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 53. TEL Dry Etching Equipment Product Portfolio Table 54. TEL Recent Development Table 55. Applied Materials Company Information Table 56. Applied Materials Business Overview Table 57. Applied Materials Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 58. Applied Materials Dry Etching Equipment Product Portfolio Table 59. Applied Materials Recent Development Table 60. Hitachi High-Technologies Company Information Table 61. Hitachi High-Technologies Business Overview Table 62. Hitachi High-Technologies Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 63. Hitachi High-Technologies Dry Etching Equipment Product Portfolio Table 64. Hitachi High-Technologies Recent Development Table 65. Oxford Instruments Company Information Table 66. Oxford Instruments Business Overview Table 67. Oxford Instruments Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 68. Oxford Instruments Dry Etching Equipment Product Portfolio Table 69. Oxford Instruments Recent Development Table 70. ULVAC Company Information Table 71. ULVAC Business Overview Table 72. ULVAC Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 73. ULVAC Dry Etching Equipment Product Portfolio Table 74. ULVAC Recent Development Table 75. SPTS Technologies Company Information Table 76. SPTS Technologies Business Overview Table 77. SPTS Technologies Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 78. SPTS Technologies Dry Etching Equipment Product Portfolio Table 79. SPTS Technologies Recent Development Table 80. GigaLane Company Information Table 81. GigaLane Business Overview Table 82. GigaLane Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 83. GigaLane Dry Etching Equipment Product Portfolio Table 84. GigaLane Recent Development Table 85. Plasma-Therm Company Information Table 86. Plasma-Therm Business Overview Table 87. Plasma-Therm Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 88. Plasma-Therm Dry Etching Equipment Product Portfolio Table 89. Plasma-Therm Recent Development Table 90. SAMCO Company Information Table 91. SAMCO Business Overview Table 92. SAMCO Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 93. SAMCO Dry Etching Equipment Product Portfolio Table 94. SAMCO Recent Development Table 95. AMEC Company Information Table 96. AMEC Business Overview Table 97. AMEC Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 98. AMEC Dry Etching Equipment Product Portfolio Table 99. AMEC Recent Development Table 100. NAURA Company Information Table 101. NAURA Business Overview Table 102. NAURA Dry Etching Equipment Production (Units), Value (US$ Million), Price (K USD/Unit) and Gross Margin (2021-2026) Table 103. NAURA Dry Etching Equipment Product Portfolio Table 104. NAURA Recent Development Table 105. Global Dry Etching Equipment Production by Region: 2021 VS 2025 VS 2032 (Units) Table 106. Global Dry Etching Equipment Production by Region (2021-2026) & (Units) Table 107. Global Dry Etching Equipment Production Market Share by Region (2021-2026) Table 108. Global Dry Etching Equipment Production Forecast by Region (2027-2032) & (Units) Table 109. Global Dry Etching Equipment Production Market Share Forecast by Region (2027-2032) Table 110. Global Dry Etching Equipment Production Value Comparison by Region: 2021 VS 2025 VS 2032 (US$ Million) Table 111. Global Dry Etching Equipment Production Value by Region (2021-2026) & (US$ Million) Table 112. Global Dry Etching Equipment Production Value Share by Region (2021-2026) Table 113. Global Dry Etching Equipment Production Value by Region (2027-2032) & (US$ Million) Table 114. Global Dry Etching Equipment Production Value Share by Region: (2027-2032) & (US$ Million) Table 115. Global Dry Etching Equipment Market Average Price (K USD/Unit) by Region (2021-2026) Table 116. Global Dry Etching Equipment Market Average Price (K USD/Unit) by Region (2027-2032) Table 117. Global Dry Etching Equipment Consumption by Region: 2021 VS 2025 VS 2032 (Units) Table 118. Global Dry Etching Equipment Consumption by Region (2021-2026) & (Units) Table 119. Global Dry Etching Equipment Consumption Market Share by Region (2021-2026) Table 120. Global Dry Etching Equipment Consumption Forecasted by Region (2027-2032) & (Units) Table 121. Global Dry Etching Equipment Consumption Forecasted Market Share by Region (2027-2032) Table 122. North America Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032 (Units) Table 123. North America Dry Etching Equipment Consumption by Country (2021-2026) & (Units) Table 124. North America Dry Etching Equipment Consumption by Country (2027-2032) & (Units) Table 125. Europe Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032 (Units) Table 126. Europe Dry Etching Equipment Consumption by Country (2021-2026) & (Units) Table 127. Europe Dry Etching Equipment Consumption by Country (2027-2032) & (Units) Table 128. Asia Pacific Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032 (Units) Table 129. Asia Pacific Dry Etching Equipment Consumption by Country (2021-2026) & (Units) Table 130. Asia Pacific Dry Etching Equipment Consumption by Country (2027-2032) & (Units) Table 131. South America Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032 (Units) Table 132. South America Dry Etching Equipment Consumption by Country (2021-2026) & (Units) Table 133. South America Dry Etching Equipment Consumption by Country (2027-2032) & (Units) Table 134. Middle East & Africa Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032 (Units) Table 135. Middle East & Africa Dry Etching Equipment Consumption by Country (2021-2026) & (Units) Table 136. Middle East & Africa Dry Etching Equipment Consumption by Country (2027-2032) & (Units) Table 137. Key Raw Materials Table 138. Raw Materials Key Suppliers Table 139. Dry Etching Equipment Distributors List Table 140. Dry Etching Equipment Customers List Table 141. Research Programs/Design for This Report Table 142. Authors List of This Report Table 143. Secondary Sources Table 144. Primary Sources List of Figures Figure 1. Dry Etching Equipment Product Image Figure 2. Global Dry Etching Equipment Production Value (US$ Million), 2021 VS 2025 VS 2032 Figure 3. Global Dry Etching Equipment Production Value (2021-2032) & (US$ Million) Figure 4. Global Dry Etching Equipment Production Capacity (2021-2032) & (Units) Figure 5. Global Dry Etching Equipment Production (2021-2032) & (Units) Figure 6. Global Dry Etching Equipment Average Price (K USD/Unit) & (2021-2032) Figure 7. Global Top 5 and 10 Dry Etching Equipment Players Market Share by Production Value in 2025 Figure 8. Manufacturers Type (Tier 1, Tier 2, and Tier 3): 2021 VS 2025 Figure 9. Inductively Coupled Plasma (ICP) Image Figure 10. Capacitive Coupled Plasma (CCP) Image Figure 11. Reactive Ion Etching (RIE) Image Figure 12. Deep Reactive Ion Etching (DRIE) Image Figure 13. Others Image Figure 14. Global Dry Etching Equipment Production by Type (2021 VS 2025 VS 2032) & (Units) Figure 15. Global Dry Etching Equipment Production Market Share 2021 VS 2025 VS 2032 Figure 16. Global Dry Etching Equipment Production Market Share by Type (2021-2032) Figure 17. Global Dry Etching Equipment Production Value by Type (2021 VS 2025 VS 2032) & (Units) Figure 18. Global Dry Etching Equipment Production Value Share 2021 VS 2025 VS 2032 Figure 19. Global Dry Etching Equipment Production Value Share by Type (2021-2032) Figure 20. Logic and Memory Image Figure 21. MEMS Image Figure 22. Power Device Image Figure 23. Others Image Figure 24. Global Dry Etching Equipment Production by Application (2021 VS 2025 VS 2032) & (Units) Figure 25. Global Dry Etching Equipment Production Market Share 2021 VS 2025 VS 2032 Figure 26. Global Dry Etching Equipment Production Market Share by Application (2021-2032) Figure 27. Global Dry Etching Equipment Production Value by Application (2021 VS 2025 VS 2032) & (Units) Figure 28. Global Dry Etching Equipment Production Value Share 2021 VS 2025 VS 2032 Figure 29. Global Dry Etching Equipment Production Value Share by Application (2021-2032) Figure 30. Global Dry Etching Equipment Production by Region: 2021 VS 2025 VS 2032 (Units) Figure 31. Global Dry Etching Equipment Production Market Share by Region: 2021 VS 2025 VS 2032 Figure 32. Global Dry Etching Equipment Production Value Comparison by Region: 2021 VS 2025 VS 2032 (US$ Million) Figure 33. Global Dry Etching Equipment Production Value Share by Region: 2021 VS 2025 VS 2032 Figure 34. North America Dry Etching Equipment Production Value (2021-2032) & (US$ Million) Figure 35. Europe Dry Etching Equipment Production Value (2021-2032) & (US$ Million) Figure 36. Asia-Pacific Dry Etching Equipment Production Value (2021-2032) & (US$ Million) Figure 37. South America Dry Etching Equipment Production Value (2021-2032) & (US$ Million) Figure 38. Middle East & Africa Dry Etching Equipment Production Value (2021-2032) & (US$ Million) Figure 39. North America Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 40. North America Dry Etching Equipment Consumption Market Share by Country (2021-2032) Figure 41. U.S. Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 42. Canada Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 43. Mexico Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 44. Europe Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 45. Europe Dry Etching Equipment Consumption Market Share by Country (2021-2032) Figure 46. Germany Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 47. France Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 48. U.K. Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 49. Italy Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 50. Netherlands Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 51. Asia Pacific Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 52. Asia Pacific Dry Etching Equipment Consumption Market Share by Country (2021-2032) Figure 53. China Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 54. Japan Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 55. South Korea Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 56. Southeast Asia Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 57. India Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 58. Australia Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 59. South America Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 60. South America Dry Etching Equipment Consumption Market Share by Country (2021-2032) Figure 61. Brazil Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 62. Argentina Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 63. Chile Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 64. Middle East & Africa Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 65. Middle East & Africa Dry Etching Equipment Consumption Market Share by Country (2021-2032) Figure 66. Egypt Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 67. South Africa Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 68. Israel Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 69. Türkiye Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 70. GCC Countries Dry Etching Equipment Consumption and Growth Rate (2021-2032) & (Units) Figure 71. Dry Etching Equipment Value Chain Figure 72. Manufacturing Cost Structure Figure 73. Dry Etching Equipment Production Mode & Process Figure 74. Direct Comparison with Distribution Share Figure 75. Distributors Profiles Figure 76. Years Considered Figure 77. Research Process Figure 78. Key Executives Interviewed

Scope & coverage.

Types
  • Inductively Coupled Plasma (ICP)
  • Capacitive Coupled Plasma (CCP)
  • Reactive Ion Etching (RIE)
  • Deep Reactive Ion Etching (DRIE)
  • Others
Applications
  • Logic and Memory
  • MEMS
  • Power Device
  • Others
Companies covered
  • Lam Research
  • TEL
  • Applied Materials
  • Hitachi High-Technologies
  • Oxford Instruments
  • ULVAC
  • SPTS Technologies
  • GigaLane
  • Plasma-Therm
  • SAMCO
  • AMEC
  • NAURA

Inside the report.

1 Market Overview
  1. 1.1 Product Definition
  2. 1.2 Global Market Growth Prospects
  3. 1.2.1 Global Dry Etching Equipment Production Value Estimates and Forecasts (2021-2032)
  4. 1.2.2 Global Dry Etching Equipment Production Capacity Estimates and Forecasts (2021-2032)
  5. 1.2.3 Global Dry Etching Equipment Production Estimates and Forecasts (2021-2032)
  6. 1.2.4 Global Dry Etching Equipment Market Average Price (2021-2032)
  7. 1.3 Assumptions and Limitations
  8. 1.4 Study Goals and Objectives
2 Global Dry Etching Equipment Market Dynamics
  1. 2.1 Dry Etching Equipment Industry Trends
  2. 2.2 Dry Etching Equipment Industry Drivers
  3. 2.3 Dry Etching Equipment Industry Opportunities and Challenges
  4. 2.4 Dry Etching Equipment Industry Restraints
3 Dry Etching Equipment Market by Manufacturers
  1. 3.1 Global Dry Etching Equipment Production Value by Manufacturers (2021-2026)
  2. 3.2 Global Dry Etching Equipment Production by Manufacturers (2021-2026)
  3. 3.3 Global Dry Etching Equipment Average Price by Manufacturers (2021-2026)
  4. 3.4 Global Dry Etching Equipment Industry Manufacturers Ranking, 2024 VS 2025 VS 2026
  5. 3.5 Global Dry Etching Equipment Key Manufacturers Manufacturing Sites & Headquarters
  6. 3.6 Global Dry Etching Equipment Manufacturers, Product Type & Application
  7. 3.7 Global Dry Etching Equipment Manufacturers Established Date
  8. 3.8 Market Competitive Analysis
  9. 3.8.1 Global Dry Etching Equipment Market CR5 and HHI
  10. 3.8.2 Global Top 5 and 10 Dry Etching Equipment Players Market Share by Production Value in 2025
  11. 3.8.3 2025 Dry Etching Equipment Tier 1, Tier 2, and Tier 3
4 Dry Etching Equipment Market by Type
  1. 4.1 Dry Etching Equipment Type Introduction
  2. 4.1.1 Inductively Coupled Plasma (ICP)
  3. 4.1.2 Capacitive Coupled Plasma (CCP)
  4. 4.1.3 Reactive Ion Etching (RIE)
  5. 4.1.4 Deep Reactive Ion Etching (DRIE)
  6. 4.1.5 Others
  7. 4.2 Global Dry Etching Equipment Production by Type
  8. 4.2.1 Global Dry Etching Equipment Production by Type (2021 VS 2025 VS 2032)
  9. 4.2.2 Global Dry Etching Equipment Production by Type (2021-2032)
  10. 4.2.3 Global Dry Etching Equipment Production Market Share by Type (2021-2032)
  11. 4.3 Global Dry Etching Equipment Production Value by Type
  12. 4.3.1 Global Dry Etching Equipment Production Value by Type (2021 VS 2025 VS 2032)
  13. 4.3.2 Global Dry Etching Equipment Production Value by Type (2021-2032)
  14. 4.3.3 Global Dry Etching Equipment Production Value Market Share by Type (2021-2032)
5 Dry Etching Equipment Market by Application
  1. 5.1 Dry Etching Equipment Application Introduction
  2. 5.1.1 Logic and Memory
  3. 5.1.2 MEMS
  4. 5.1.3 Power Device
  5. 5.1.4 Others
  6. 5.2 Global Dry Etching Equipment Production by Application
  7. 5.2.1 Global Dry Etching Equipment Production by Application (2021 VS 2025 VS 2032)
  8. 5.2.2 Global Dry Etching Equipment Production by Application (2021-2032)
  9. 5.2.3 Global Dry Etching Equipment Production Market Share by Application (2021-2032)
  10. 5.3 Global Dry Etching Equipment Production Value by Application
  11. 5.3.1 Global Dry Etching Equipment Production Value by Application (2021 VS 2025 VS 2032)
  12. 5.3.2 Global Dry Etching Equipment Production Value by Application (2021-2032)
  13. 5.3.3 Global Dry Etching Equipment Production Value Market Share by Application (2021-2032)
6 Company Profiles
  1. 6.1 Lam Research
  2. 6.1.1 Lam Research Company Information
  3. 6.1.2 Lam Research Business Overview
  4. 6.1.3 Lam Research Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  5. 6.1.4 Lam Research Dry Etching Equipment Product Portfolio
  6. 6.1.5 Lam Research Recent Developments
  7. 6.2 TEL
  8. 6.2.1 TEL Company Information
  9. 6.2.2 TEL Business Overview
  10. 6.2.3 TEL Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  11. 6.2.4 TEL Dry Etching Equipment Product Portfolio
  12. 6.2.5 TEL Recent Developments
  13. 6.3 Applied Materials
  14. 6.3.1 Applied Materials Company Information
  15. 6.3.2 Applied Materials Business Overview
  16. 6.3.3 Applied Materials Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  17. 6.3.4 Applied Materials Dry Etching Equipment Product Portfolio
  18. 6.3.5 Applied Materials Recent Developments
  19. 6.4 Hitachi High-Technologies
  20. 6.4.1 Hitachi High-Technologies Company Information
  21. 6.4.2 Hitachi High-Technologies Business Overview
  22. 6.4.3 Hitachi High-Technologies Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  23. 6.4.4 Hitachi High-Technologies Dry Etching Equipment Product Portfolio
  24. 6.4.5 Hitachi High-Technologies Recent Developments
  25. 6.5 Oxford Instruments
  26. 6.5.1 Oxford Instruments Company Information
  27. 6.5.2 Oxford Instruments Business Overview
  28. 6.5.3 Oxford Instruments Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  29. 6.5.4 Oxford Instruments Dry Etching Equipment Product Portfolio
  30. 6.5.5 Oxford Instruments Recent Developments
  31. 6.6 ULVAC
  32. 6.6.1 ULVAC Company Information
  33. 6.6.2 ULVAC Business Overview
  34. 6.6.3 ULVAC Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  35. 6.6.4 ULVAC Dry Etching Equipment Product Portfolio
  36. 6.6.5 ULVAC Recent Developments
  37. 6.7 SPTS Technologies
  38. 6.7.1 SPTS Technologies Company Information
  39. 6.7.2 SPTS Technologies Business Overview
  40. 6.7.3 SPTS Technologies Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  41. 6.7.4 SPTS Technologies Dry Etching Equipment Product Portfolio
  42. 6.7.5 SPTS Technologies Recent Developments
  43. 6.8 GigaLane
  44. 6.8.1 GigaLane Company Information
  45. 6.8.2 GigaLane Business Overview
  46. 6.8.3 GigaLane Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  47. 6.8.4 GigaLane Dry Etching Equipment Product Portfolio
  48. 6.8.5 GigaLane Recent Developments
  49. 6.9 Plasma-Therm
  50. 6.9.1 Plasma-Therm Company Information
  51. 6.9.2 Plasma-Therm Business Overview
  52. 6.9.3 Plasma-Therm Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  53. 6.9.4 Plasma-Therm Dry Etching Equipment Product Portfolio
  54. 6.9.5 Plasma-Therm Recent Developments
  55. 6.10 SAMCO
  56. 6.10.1 SAMCO Company Information
  57. 6.10.2 SAMCO Business Overview
  58. 6.10.3 SAMCO Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  59. 6.10.4 SAMCO Dry Etching Equipment Product Portfolio
  60. 6.10.5 SAMCO Recent Developments
  61. 6.11 AMEC
  62. 6.11.1 AMEC Company Information
  63. 6.11.2 AMEC Business Overview
  64. 6.11.3 AMEC Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  65. 6.11.4 AMEC Dry Etching Equipment Product Portfolio
  66. 6.11.5 AMEC Recent Developments
  67. 6.12 NAURA
  68. 6.12.1 NAURA Company Information
  69. 6.12.2 NAURA Business Overview
  70. 6.12.3 NAURA Dry Etching Equipment Production, Value and Gross Margin (2021-2026)
  71. 6.12.4 NAURA Dry Etching Equipment Product Portfolio
  72. 6.12.5 NAURA Recent Developments
7 Global Dry Etching Equipment Production by Region
  1. 7.1 Global Dry Etching Equipment Production by Region: 2021 VS 2025 VS 2032
  2. 7.2 Global Dry Etching Equipment Production by Region (2021-2032)
  3. 7.2.1 Global Dry Etching Equipment Production by Region (2021-2026)
  4. 7.2.2 Global Dry Etching Equipment Production Forecast by Region (2027-2032)
  5. 7.3 Global Dry Etching Equipment Production by Region: 2021 VS 2025 VS 2032
  6. 7.4 Global Dry Etching Equipment Production Value by Region (2021-2032)
  7. 7.4.1 Global Dry Etching Equipment Production Value by Region (2021-2026)
  8. 7.4.2 Global Dry Etching Equipment Production Value by Region (2027-2032)
  9. 7.5 Global Dry Etching Equipment Market Price Analysis by Region (2021-2032)
  10. 7.6 Regional Production Value Trends (2021-2032)
  11. 7.6.1 North America Dry Etching Equipment Production Value (2021-2032)
  12. 7.6.2 Europe Dry Etching Equipment Production Value (2021-2032)
  13. 7.6.3 Asia-Pacific Dry Etching Equipment Production Value (2021-2032)
  14. 7.6.4 South America Dry Etching Equipment Production Value (2021-2032)
  15. 7.6.5 Middle East & Africa Dry Etching Equipment Production Value (2021-2032)
8 Global Dry Etching Equipment Consumption by Region
  1. 8.1 Global Dry Etching Equipment Consumption by Region: 2021 VS 2025 VS 2032
  2. 8.2 Global Dry Etching Equipment Consumption by Region (2021-2032)
  3. 8.2.1 Global Dry Etching Equipment Consumption by Region (2021-2026)
  4. 8.2.2 Global Dry Etching Equipment Consumption by Region (2027-2032)
  5. 8.3 North America
  6. 8.3.1 North America Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032
  7. 8.3.2 North America Dry Etching Equipment Consumption by Country (2021-2032)
  8. 8.3.3 U.S.
  9. 8.3.4 Canada
  10. 8.3.5 Mexico
  11. 8.4 Europe
  12. 8.4.1 Europe Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032
  13. 8.4.2 Europe Dry Etching Equipment Consumption by Country (2021-2032)
  14. 8.4.3 Germany
  15. 8.4.4 France
  16. 8.4.5 U.K.
  17. 8.4.6 Italy
  18. 8.4.7 Netherlands
  19. 8.5 Asia Pacific
  20. 8.5.1 Asia Pacific Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032
  21. 8.5.2 Asia Pacific Dry Etching Equipment Consumption by Country (2021-2032)
  22. 8.5.3 China
  23. 8.5.4 Japan
  24. 8.5.5 South Korea
  25. 8.5.6 Southeast Asia
  26. 8.5.7 India
  27. 8.5.8 Australia
  28. 8.6 South America
  29. 8.6.1 South America Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032
  30. 8.6.2 South America Dry Etching Equipment Consumption by Country (2021-2032)
  31. 8.6.3 Brazil
  32. 8.6.4 Argentina
  33. 8.6.5 Chile
  34. 8.6.6 Colombia
  35. 8.7 Middle East & Africa
  36. 8.7.1 Middle East & Africa Dry Etching Equipment Consumption Growth Rate by Country: 2021 VS 2025 VS 2032
  37. 8.7.2 Middle East & Africa Dry Etching Equipment Consumption by Country (2021-2032)
  38. 8.7.3 Egypt
  39. 8.7.4 South Africa
  40. 8.7.5 Israel
  41. 8.7.6 Türkiye
  42. 8.7.7 GCC Countries
9 Value Chain and Sales Channels Analysis
  1. 9.1 Dry Etching Equipment Value Chain Analysis
  2. 9.1.1 Dry Etching Equipment Key Raw Materials
  3. 9.1.2 Raw Materials Key Suppliers
  4. 9.1.3 Manufacturing Cost Structure
  5. 9.1.4 Dry Etching Equipment Production Mode & Process
  6. 9.2 Dry Etching Equipment Sales Channels Analysis
  7. 9.2.1 Direct Comparison with Distribution Share
  8. 9.2.2 Dry Etching Equipment Distributors
  9. 9.2.3 Dry Etching Equipment Customers
10 Concluding Insights
    11 Appendix
    1. 11.1 Reasons for Doing This Study
    2. 11.2 Research Methodology
    3. 11.3 Research Process
    4. 11.4 Authors List of This Report
    5. 11.5 Data Source
    6. 11.5.1 Secondary Sources
    7. 11.5.2 Primary Sources
    8. 11.6 Disclaimer

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