APO RESEARCH · REPORT
High Purity Turbomolecular Pumps
Turbomolecular pumps transfer momentum from rapidly rotating blades to gas molecules to generate high vacuum in processes with stringent contamination-control requirements.

Selected research
Industry Growth & Trends
Global High Purity Turbomolecular Pumps Industry Growth and Trends Forecast to 2032
Market perspective
The global High Purity Turbomolecular Pumps market was valued at US$ million in 2026 and is projected to reach US$ million by 2032, implying a CAGR of xx% over 2026-2032.
The North America market for High Purity Turbomolecular Pumps is projected to increase from US$ million in 2026 to US$ million by 2032, corresponding to a CAGR of % over 2026-2032.
The Europe market for High Purity Turbomolecular Pumps is projected to increase from US$ million in 2026 to US$ million by 2032, registering a CAGR of % over 2026-2032.
Read the full market overview
The Asia Pacific market for High Purity Turbomolecular Pumps is projected to increase from US$ million in 2026 to US$ million by 2032, at a CAGR of % over 2026-2032.
Leading global manufacturers of High Purity Turbomolecular Pumps include Agilent, Edwards Vacuum, Leybold GmbH, Pfeiffer Vacuum Technology AG, ULVAC, Osaka Vacuum, Shimadzu, Hefei Yuchi Vacuum Technology and Shanghai Gaosheng Integrated Circuit Equipment, among others. In 2025, the top three vendors together accounted for approximately % of global revenue.
Report Scope
This report provides a structured, data-driven view of the global High Purity Turbomolecular Pumps market, combining harmonized quantitative metrics with targeted qualitative insight to support business and growth strategy, market positioning, and capital allocation.
The High Purity Turbomolecular Pumps market size, estimates, and forecasts are presented in terms of sales volume (k units) and revenue (US$ million), with 2025 as the base year and historical and forecast data for 2021-2032. The report segments the global High Purity Turbomolecular Pumps market by Type, Application, region/country, and company, provides regional market sizes at the segment level, profiles the competitive landscape and key players and their market ranks, and reviews technology trends and new product developments relevant to High Purity Turbomolecular Pumps.
Key Companies & Market Share Insights
This section analyzes the strategies and performance of leading manufacturers in the global High Purity Turbomolecular Pumps market, including portfolio focus, innovation and product development, mergers and acquisitions, collaborations, and geographic expansion used to sustain or enhance competitive positions. It also summarizes recent corporate developments and key financial indicators and provides global revenue, price, and sales volume data by manufacturer for 2020-2025, enabling benchmarking of scale, pricing, and market share and supporting assessment of market concentration through indicators such as CR5 and CR10.
High Purity Turbomolecular Pumps Market by Company
Agilent
Edwards Vacuum
Leybold GmbH
Pfeiffer Vacuum Technology AG
ULVAC
Osaka Vacuum
Shimadzu
Hefei Yuchi Vacuum Technology
Shanghai Gaosheng Integrated Circuit Equipment
Zhongke Jiuwei Technology
Beijing Zhongke Keyi
Hangzhou Kuntai Maglcy Technology
High Purity Turbomolecular Pumps Segment by Type
Water-cooled
Air-cooled
High Purity Turbomolecular Pumps Segment by Application
Lithography
CVD & PVD
Wafer Dry Etching
Diffusion
Others
High Purity Turbomolecular Pumps Segment by Region
North America
United States
Canada
Mexico
Europe
Germany
France
U.K.
Italy
Russia
Spain
Netherlands
Switzerland
Sweden
Poland
Asia-Pacific
China
Japan
South Korea
India
Australia
Taiwan
Southeast Asia
South America
Brazil
Argentina
Chile
Middle East & Africa
Egypt
South Africa
Israel
Türkiye
GCC Countries
Key Drivers & Barriers
High-impact rendering factors and drivers have been studied in this report to aid the readers to understand the general development. Moreover, the report includes restraints and challenges that may act as stumbling blocks on the way of the players. This will assist the users to be attentive and make informed decisions related to business. Specialists have also laid their focus on the upcoming business prospects.
Reasons to Buy This Report
1. This report will help the readers to understand the competition within the industries and strategies for the competitive environment to enhance the potential profit. The report also focuses on the competitive landscape of the global High Purity Turbomolecular Pumps market, and introduces in detail the market share, industry ranking, competitor ecosystem, market performance, new product development, operation situation, expansion, and acquisition. etc. of the main players, which helps the readers to identify the main competitors and deeply understand the competition pattern of the market.
2. This report will help stakeholders to understand the global industry status and trends of High Purity Turbomolecular Pumps and provides them with information on key market drivers, restraints, challenges, and opportunities.
3. This report will help stakeholders to understand competitors better and gain more insights to strengthen their position in their businesses. The competitive landscape section includes the market share and rank (in volume and value), competitor ecosystem, new product development, expansion, and acquisition.
4. This report stays updated with novel technology integration, features, and the latest developments in the market.
5. This report helps stakeholders to gain insights into which regions to target globally.
6. This report helps stakeholders to gain insights into the end-user perception concerning the adoption of High Purity Turbomolecular Pumps.
7. This report helps stakeholders to identify some of the key players in the market and understand their valuable contribution.
Chapter Outline
Chapter 1: Introduces the study scope of this report, executive summary of market segments by type, market size segments for North America, Europe, Asia Pacific, South America, Middle East & Africa.
Chapter 2: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 3: Detailed analysis of High Purity Turbomolecular Pumps manufacturers competitive landscape, price, sales, revenue, market share and ranking, latest development plan, merger, and acquisition information, etc.
Chapter 4: Sales, revenue of High Purity Turbomolecular Pumps in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the future development prospects, and market space in the world.
Chapter 5: Introduces market segments by application, market size segment for North America, Europe, Asia Pacific, South America, Middle East & Africa.
Chapter 6: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
Chapter 7, 8, 9, 10 and 11: North America, Europe, Asia Pacific, South America, Middle East & Africa, sales and revenue by country.
Chapter 12: Analysis of industrial chain, key raw materials, manufacturing cost, and market dynamics.
Chapter 13: Concluding Insights of the report.
More report detail
Tables and figures
Scope & coverage.
Types
- Water-cooled
- Air-cooled
Applications
- Lithography
- CVD & PVD
- Wafer Dry Etching
- Diffusion
- Others
Companies covered
- Agilent
- Edwards Vacuum
- Leybold GmbH
- Pfeiffer Vacuum Technology AG
- ULVAC
- Osaka Vacuum
- Shimadzu
- Hefei Yuchi Vacuum Technology
- Shanghai Gaosheng Integrated Circuit Equipment
- Zhongke Jiuwei Technology
- Beijing Zhongke Keyi
- Hangzhou Kuntai Maglcy Technology
Inside the report.
1 Market Overview
- 1.1 Product Definition
- 1.2 Global Market Growth Prospects
- 1.2.1 Global High Purity Turbomolecular Pumps Market Size Estimates and Forecasts (2021-2032)
- 1.2.2 Global High Purity Turbomolecular Pumps Sales Estimates and Forecasts (2021-2032)
- 1.3 High Purity Turbomolecular Pumps Market by Type
- 1.3.1 Water-cooled
- 1.3.2 Air-cooled
- 1.4 Global High Purity Turbomolecular Pumps Market Size by Type
- 1.4.1 Global High Purity Turbomolecular Pumps Market Size Overview by Type (2021-2032)
- 1.4.2 Global High Purity Turbomolecular Pumps Historic Market Size Review by Type (2021-2026)
- 1.4.3 Global High Purity Turbomolecular Pumps Forecasted Market Size by Type (2027-2032)
- 1.5 Key Regions Market Size by Type
- 1.5.1 North America High Purity Turbomolecular Pumps Sales Breakdown by Type (2021-2026)
- 1.5.2 Europe High Purity Turbomolecular Pumps Sales Breakdown by Type (2021-2026)
- 1.5.3 Asia-Pacific High Purity Turbomolecular Pumps Sales Breakdown by Type (2021-2026)
- 1.5.4 South America High Purity Turbomolecular Pumps Sales Breakdown by Type (2021-2026)
- 1.5.5 Middle East and Africa High Purity Turbomolecular Pumps Sales Breakdown by Type (2021-2026)
2 Global Market Dynamics
- 2.1 High Purity Turbomolecular Pumps Industry Trends
- 2.2 High Purity Turbomolecular Pumps Industry Drivers
- 2.3 High Purity Turbomolecular Pumps Industry Opportunities and Challenges
- 2.4 High Purity Turbomolecular Pumps Industry Restraints
3 Market Competitive Landscape by Company
- 3.1 Global Top Players by High Purity Turbomolecular Pumps Revenue (2021-2026)
- 3.2 Global Top Players by High Purity Turbomolecular Pumps Sales (2021-2026)
- 3.3 Global Top Players by High Purity Turbomolecular Pumps Price (2021-2026)
- 3.4 Global High Purity Turbomolecular Pumps Industry Company Ranking, 2024 VS 2025 VS 2026
- 3.5 Global High Purity Turbomolecular Pumps Major Company Production Sites & Headquarters
- 3.6 Global High Purity Turbomolecular Pumps Company, Product Type & Application
- 3.7 Global High Purity Turbomolecular Pumps Company Establishment Date
- 3.8 Market Competitive Analysis
- 3.8.1 Global High Purity Turbomolecular Pumps Market CR5 and HHI
- 3.8.2 Global Top 5 and 10 High Purity Turbomolecular Pumps Players Market Share by Revenue in 2025
- 3.8.3 2025 High Purity Turbomolecular Pumps Tier 1, Tier 2, and Tier 3
4 High Purity Turbomolecular Pumps Regional Status and Outlook
- 4.1 Global High Purity Turbomolecular Pumps Market Size and CAGR by Region: 2021 VS 2025 VS 2032
- 4.2 Global High Purity Turbomolecular Pumps Historic Market Size by Region
- 4.2.1 Global High Purity Turbomolecular Pumps Sales in Volume by Region (2021-2026)
- 4.2.2 Global High Purity Turbomolecular Pumps Sales in Value by Region (2021-2026)
- 4.2.3 Global High Purity Turbomolecular Pumps Sales (Volume & Value), Price and Gross Margin (2021-2026)
- 4.3 Global High Purity Turbomolecular Pumps Forecasted Market Size by Region
- 4.3.1 Global High Purity Turbomolecular Pumps Sales in Volume by Region (2027-2032)
- 4.3.2 Global High Purity Turbomolecular Pumps Sales in Value by Region (2027-2032)
- 4.3.3 Global High Purity Turbomolecular Pumps Sales (Volume & Value), Price and Gross Margin (2027-2032)
5 High Purity Turbomolecular Pumps by Application
- 5.1 High Purity Turbomolecular Pumps Market by Application
- 5.1.1 Lithography
- 5.1.2 CVD & PVD
- 5.1.3 Wafer Dry Etching
- 5.1.4 Diffusion
- 5.1.5 Others
- 5.2 Global High Purity Turbomolecular Pumps Market Size by Application
- 5.2.1 Global High Purity Turbomolecular Pumps Market Size Overview by Application (2021-2032)
- 5.2.2 Global High Purity Turbomolecular Pumps Historic Market Size Review by Application (2021-2026)
- 5.2.3 Global High Purity Turbomolecular Pumps Forecasted Market Size by Application (2027-2032)
- 5.3 Key Regions Market Size by Application
- 5.3.1 North America High Purity Turbomolecular Pumps Sales Breakdown by Application (2021-2026)
- 5.3.2 Europe High Purity Turbomolecular Pumps Sales Breakdown by Application (2021-2026)
- 5.3.3 Asia-Pacific High Purity Turbomolecular Pumps Sales Breakdown by Application (2021-2026)
- 5.3.4 South America High Purity Turbomolecular Pumps Sales Breakdown by Application (2021-2026)
- 5.3.5 Middle East and Africa High Purity Turbomolecular Pumps Sales Breakdown by Application (2021-2026)
6 Company Profiles
- 6.1 Agilent
- 6.1.1 Agilent Company Information
- 6.1.2 Agilent Business Overview
- 6.1.3 Agilent High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.1.4 Agilent High Purity Turbomolecular Pumps Product Portfolio
- 6.1.5 Agilent Recent Developments
- 6.2 Edwards Vacuum
- 6.2.1 Edwards Vacuum Company Information
- 6.2.2 Edwards Vacuum Business Overview
- 6.2.3 Edwards Vacuum High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.2.4 Edwards Vacuum High Purity Turbomolecular Pumps Product Portfolio
- 6.2.5 Edwards Vacuum Recent Developments
- 6.3 Leybold GmbH
- 6.3.1 Leybold GmbH Company Information
- 6.3.2 Leybold GmbH Business Overview
- 6.3.3 Leybold GmbH High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.3.4 Leybold GmbH High Purity Turbomolecular Pumps Product Portfolio
- 6.3.5 Leybold GmbH Recent Developments
- 6.4 Pfeiffer Vacuum Technology AG
- 6.4.1 Pfeiffer Vacuum Technology AG Company Information
- 6.4.2 Pfeiffer Vacuum Technology AG Business Overview
- 6.4.3 Pfeiffer Vacuum Technology AG High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.4.4 Pfeiffer Vacuum Technology AG High Purity Turbomolecular Pumps Product Portfolio
- 6.4.5 Pfeiffer Vacuum Technology AG Recent Developments
- 6.5 ULVAC
- 6.5.1 ULVAC Company Information
- 6.5.2 ULVAC Business Overview
- 6.5.3 ULVAC High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.5.4 ULVAC High Purity Turbomolecular Pumps Product Portfolio
- 6.5.5 ULVAC Recent Developments
- 6.6 Osaka Vacuum
- 6.6.1 Osaka Vacuum Company Information
- 6.6.2 Osaka Vacuum Business Overview
- 6.6.3 Osaka Vacuum High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.6.4 Osaka Vacuum High Purity Turbomolecular Pumps Product Portfolio
- 6.6.5 Osaka Vacuum Recent Developments
- 6.7 Shimadzu
- 6.7.1 Shimadzu Company Information
- 6.7.2 Shimadzu Business Overview
- 6.7.3 Shimadzu High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.7.4 Shimadzu High Purity Turbomolecular Pumps Product Portfolio
- 6.7.5 Shimadzu Recent Developments
- 6.8 Hefei Yuchi Vacuum Technology
- 6.8.1 Hefei Yuchi Vacuum Technology Company Information
- 6.8.2 Hefei Yuchi Vacuum Technology Business Overview
- 6.8.3 Hefei Yuchi Vacuum Technology High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.8.4 Hefei Yuchi Vacuum Technology High Purity Turbomolecular Pumps Product Portfolio
- 6.8.5 Hefei Yuchi Vacuum Technology Recent Developments
- 6.9 Shanghai Gaosheng Integrated Circuit Equipment
- 6.9.1 Shanghai Gaosheng Integrated Circuit Equipment Company Information
- 6.9.2 Shanghai Gaosheng Integrated Circuit Equipment Business Overview
- 6.9.3 Shanghai Gaosheng Integrated Circuit Equipment High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.9.4 Shanghai Gaosheng Integrated Circuit Equipment High Purity Turbomolecular Pumps Product Portfolio
- 6.9.5 Shanghai Gaosheng Integrated Circuit Equipment Recent Developments
- 6.10 Zhongke Jiuwei Technology
- 6.10.1 Zhongke Jiuwei Technology Company Information
- 6.10.2 Zhongke Jiuwei Technology Business Overview
- 6.10.3 Zhongke Jiuwei Technology High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.10.4 Zhongke Jiuwei Technology High Purity Turbomolecular Pumps Product Portfolio
- 6.10.5 Zhongke Jiuwei Technology Recent Developments
- 6.11 Beijing Zhongke Keyi
- 6.11.1 Beijing Zhongke Keyi Company Information
- 6.11.2 Beijing Zhongke Keyi Business Overview
- 6.11.3 Beijing Zhongke Keyi High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.11.4 Beijing Zhongke Keyi High Purity Turbomolecular Pumps Product Portfolio
- 6.11.5 Beijing Zhongke Keyi Recent Developments
- 6.12 Hangzhou Kuntai Maglcy Technology
- 6.12.1 Hangzhou Kuntai Maglcy Technology Company Information
- 6.12.2 Hangzhou Kuntai Maglcy Technology Business Overview
- 6.12.3 Hangzhou Kuntai Maglcy Technology High Purity Turbomolecular Pumps Sales, Revenue and Gross Margin (2021-2026)
- 6.12.4 Hangzhou Kuntai Maglcy Technology High Purity Turbomolecular Pumps Product Portfolio
- 6.12.5 Hangzhou Kuntai Maglcy Technology Recent Developments
7 North America by Country
- 7.1 North America High Purity Turbomolecular Pumps Sales by Country
- 7.1.1 North America High Purity Turbomolecular Pumps Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 7.1.2 North America High Purity Turbomolecular Pumps Sales by Country (2021-2026)
- 7.1.3 North America High Purity Turbomolecular Pumps Sales Forecast by Country (2027-2032)
- 7.2 North America High Purity Turbomolecular Pumps Market Size by Country
- 7.2.1 North America High Purity Turbomolecular Pumps Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 7.2.2 North America High Purity Turbomolecular Pumps Market Size by Country (2021-2026)
- 7.2.3 North America High Purity Turbomolecular Pumps Market Size Forecast by Country (2027-2032)
8 Europe by Country
- 8.1 Europe High Purity Turbomolecular Pumps Sales by Country
- 8.1.1 Europe High Purity Turbomolecular Pumps Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 8.1.2 Europe High Purity Turbomolecular Pumps Sales by Country (2021-2026)
- 8.1.3 Europe High Purity Turbomolecular Pumps Sales Forecast by Country (2027-2032)
- 8.2 Europe High Purity Turbomolecular Pumps Market Size by Country
- 8.2.1 Europe High Purity Turbomolecular Pumps Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 8.2.2 Europe High Purity Turbomolecular Pumps Market Size by Country (2021-2026)
- 8.2.3 Europe High Purity Turbomolecular Pumps Market Size Forecast by Country (2027-2032)
9 Asia-Pacific by Country
- 9.1 Asia-Pacific High Purity Turbomolecular Pumps Sales by Country
- 9.1.1 Asia-Pacific High Purity Turbomolecular Pumps Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 9.1.2 Asia-Pacific High Purity Turbomolecular Pumps Sales by Country (2021-2026)
- 9.1.3 Asia-Pacific High Purity Turbomolecular Pumps Sales Forecast by Country (2027-2032)
- 9.2 Asia-Pacific High Purity Turbomolecular Pumps Market Size by Country
- 9.2.1 Asia-Pacific High Purity Turbomolecular Pumps Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 9.2.2 Asia-Pacific High Purity Turbomolecular Pumps Market Size by Country (2021-2026)
- 9.2.3 Asia-Pacific High Purity Turbomolecular Pumps Market Size Forecast by Country (2027-2032)
10 South America by Country
- 10.1 South America High Purity Turbomolecular Pumps Sales by Country
- 10.1.1 South America High Purity Turbomolecular Pumps Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 10.1.2 South America High Purity Turbomolecular Pumps Sales by Country (2021-2026)
- 10.1.3 South America High Purity Turbomolecular Pumps Sales Forecast by Country (2027-2032)
- 10.2 South America High Purity Turbomolecular Pumps Market Size by Country
- 10.2.1 South America High Purity Turbomolecular Pumps Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 10.2.2 South America High Purity Turbomolecular Pumps Market Size by Country (2021-2026)
- 10.2.3 South America High Purity Turbomolecular Pumps Market Size Forecast by Country (2027-2032)
11 Middle East and Africa by Country
- 11.1 Middle East and Africa High Purity Turbomolecular Pumps Sales by Country
- 11.1.1 Middle East and Africa High Purity Turbomolecular Pumps Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 11.1.2 Middle East and Africa High Purity Turbomolecular Pumps Sales by Country (2021-2026)
- 11.1.3 Middle East and Africa High Purity Turbomolecular Pumps Sales Forecast by Country (2027-2032)
- 11.2 Middle East and Africa High Purity Turbomolecular Pumps Market Size by Country
- 11.2.1 Middle East and Africa High Purity Turbomolecular Pumps Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 11.2.2 Middle East and Africa High Purity Turbomolecular Pumps Market Size by Country (2021-2026)
- 11.2.3 Middle East and Africa High Purity Turbomolecular Pumps Market Size Forecast by Country (2027-2032)
12 Value Chain and Sales Channels Analysis
- 12.1 High Purity Turbomolecular Pumps Value Chain Analysis
- 12.1.1 High Purity Turbomolecular Pumps Key Raw Materials
- 12.1.2 Key Raw Materials Price
- 12.1.3 Raw Materials Key Suppliers
- 12.1.4 Manufacturing Cost Structure
- 12.1.5 High Purity Turbomolecular Pumps Production Mode & Process
- 12.2 High Purity Turbomolecular Pumps Sales Channels Analysis
- 12.2.1 Direct Comparison with Distribution Share
- 12.2.2 High Purity Turbomolecular Pumps Distributors
- 12.2.3 High Purity Turbomolecular Pumps Customers
13 Concluding Insights
14 Appendix
- 14.1 Reasons for Doing This Study
- 14.2 Research Methodology
- 14.3 Research Process
- 14.4 Authors List of This Report
- 14.5 Data Source
- 14.5.1 Secondary Sources
- 14.5.2 Primary Sources
- 14.6 Disclaimer
GET THE RESEARCH
Choose your license.
Choose who needs access.
All options are for this report and research series.
PDF by email within 3–5 working days after payment confirmation.
Talk to an analyst