Selected research
Industry Growth & Trends
Global Dry Etching Equipment for Semiconductor Industry Growth and Trends Forecast to 2032
Market perspective
The global Dry Etching Equipment for Semiconductor market was valued at US$ million in 2026 and is projected to reach US$ million by 2032, implying a CAGR of xx% over 2026-2032.
The North America market for Dry Etching Equipment for Semiconductor is projected to increase from US$ million in 2026 to US$ million by 2032, corresponding to a CAGR of % over 2026-2032.
The Europe market for Dry Etching Equipment for Semiconductor is projected to increase from US$ million in 2026 to US$ million by 2032, registering a CAGR of % over 2026-2032.
Read the full market overview
The Asia Pacific market for Dry Etching Equipment for Semiconductor is projected to increase from US$ million in 2026 to US$ million by 2032, at a CAGR of % over 2026-2032.
Leading global manufacturers of Dry Etching Equipment for Semiconductor include Lam Research, Tokyo Electron Limited, Applied Materials, Hitachi High-Tech, SEMES, AMEC, NAURA, SPTS Technologies (KLA) and Oxford Instruments, among others. In 2025, the top three vendors together accounted for approximately % of global revenue.
Report Scope
This report provides a structured, data-driven view of the global Dry Etching Equipment for Semiconductor market, combining harmonized quantitative metrics with targeted qualitative insight to support business and growth strategy, market positioning, and capital allocation.
The Dry Etching Equipment for Semiconductor market size, estimates, and forecasts are presented in terms of sales volume (k units) and revenue (US$ million), with 2025 as the base year and historical and forecast data for 2021-2032. The report segments the global Dry Etching Equipment for Semiconductor market by Type, Application, region/country, and company, provides regional market sizes at the segment level, profiles the competitive landscape and key players and their market ranks, and reviews technology trends and new product developments relevant to Dry Etching Equipment for Semiconductor.
Key Companies & Market Share Insights
This section analyzes the strategies and performance of leading manufacturers in the global Dry Etching Equipment for Semiconductor market, including portfolio focus, innovation and product development, mergers and acquisitions, collaborations, and geographic expansion used to sustain or enhance competitive positions. It also summarizes recent corporate developments and key financial indicators and provides global revenue, price, and sales volume data by manufacturer for 2020-2025, enabling benchmarking of scale, pricing, and market share and supporting assessment of market concentration through indicators such as CR5 and CR10.
Dry Etching Equipment for Semiconductor Market by Company
Lam Research
Tokyo Electron Limited
Applied Materials
Hitachi High-Tech
SEMES
AMEC
NAURA
SPTS Technologies (KLA)
Oxford Instruments
ULVAC
Plasma-Therm
GigaLane
VM
Jusung Engineering
SAMCO
Dry Etching Equipment for Semiconductor Segment by Type
Inductively Coupled Plasma (ICP)
Capacitive Coupled Plasma (CCP)
Reactive Ion Etching (RIE)
Deep Reactive Ion Etching (DRIE)
Others
Dry Etching Equipment for Semiconductor Segment by Application
Logic and Memory
Power Device
MEMS
Others
Dry Etching Equipment for Semiconductor Segment by Region
North America
United States
Canada
Mexico
Europe
Germany
France
U.K.
Italy
Russia
Spain
Netherlands
Switzerland
Sweden
Poland
Asia-Pacific
China
Japan
South Korea
India
Australia
Taiwan
Southeast Asia
South America
Brazil
Argentina
Chile
Middle East & Africa
Egypt
South Africa
Israel
Türkiye
GCC Countries
Key Drivers & Barriers
High-impact rendering factors and drivers have been studied in this report to aid the readers to understand the general development. Moreover, the report includes restraints and challenges that may act as stumbling blocks on the way of the players. This will assist the users to be attentive and make informed decisions related to business. Specialists have also laid their focus on the upcoming business prospects.
Reasons to Buy This Report
1. This report will help the readers to understand the competition within the industries and strategies for the competitive environment to enhance the potential profit. The report also focuses on the competitive landscape of the global Dry Etching Equipment for Semiconductor market, and introduces in detail the market share, industry ranking, competitor ecosystem, market performance, new product development, operation situation, expansion, and acquisition. etc. of the main players, which helps the readers to identify the main competitors and deeply understand the competition pattern of the market.
2. This report will help stakeholders to understand the global industry status and trends of Dry Etching Equipment for Semiconductor and provides them with information on key market drivers, restraints, challenges, and opportunities.
3. This report will help stakeholders to understand competitors better and gain more insights to strengthen their position in their businesses. The competitive landscape section includes the market share and rank (in volume and value), competitor ecosystem, new product development, expansion, and acquisition.
4. This report stays updated with novel technology integration, features, and the latest developments in the market.
5. This report helps stakeholders to gain insights into which regions to target globally.
6. This report helps stakeholders to gain insights into the end-user perception concerning the adoption of Dry Etching Equipment for Semiconductor.
7. This report helps stakeholders to identify some of the key players in the market and understand their valuable contribution.
Chapter Outline
Chapter 1: Introduces the study scope of this report, executive summary of market segments by type, market size segments for North America, Europe, Asia Pacific, South America, Middle East & Africa.
Chapter 2: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 3: Detailed analysis of Dry Etching Equipment for Semiconductor manufacturers competitive landscape, price, sales, revenue, market share and ranking, latest development plan, merger, and acquisition information, etc.
Chapter 4: Sales, revenue of Dry Etching Equipment for Semiconductor in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the future development prospects, and market space in the world.
Chapter 5: Introduces market segments by application, market size segment for North America, Europe, Asia Pacific, South America, Middle East & Africa.
Chapter 6: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
Chapter 7, 8, 9, 10 and 11: North America, Europe, Asia Pacific, South America, Middle East & Africa, sales and revenue by country.
Chapter 12: Analysis of industrial chain, key raw materials, manufacturing cost, and market dynamics.
Chapter 13: Concluding Insights of the report.
More report detail
Tables and figures
Scope & coverage.
Types
- Inductively Coupled Plasma (ICP)
- Capacitive Coupled Plasma (CCP)
- Reactive Ion Etching (RIE)
- Deep Reactive Ion Etching (DRIE)
- Others
Applications
- Logic and Memory
- Power Device
- MEMS
- Others
Companies covered
- Lam Research
- Tokyo Electron Limited
- Applied Materials
- Hitachi High-Tech
- SEMES
- AMEC
- NAURA
- SPTS Technologies (KLA)
- Oxford Instruments
- ULVAC
- Plasma-Therm
- GigaLane
- VM
- Jusung Engineering
- SAMCO
Inside the report.
1 Market Overview
- 1.1 Product Definition
- 1.2 Global Market Growth Prospects
- 1.2.1 Global Dry Etching Equipment for Semiconductor Market Size Estimates and Forecasts (2021-2032)
- 1.2.2 Global Dry Etching Equipment for Semiconductor Sales Estimates and Forecasts (2021-2032)
- 1.3 Dry Etching Equipment for Semiconductor Market by Type
- 1.3.1 Inductively Coupled Plasma (ICP)
- 1.3.2 Capacitive Coupled Plasma (CCP)
- 1.3.3 Reactive Ion Etching (RIE)
- 1.3.4 Deep Reactive Ion Etching (DRIE)
- 1.3.5 Others
- 1.4 Global Dry Etching Equipment for Semiconductor Market Size by Type
- 1.4.1 Global Dry Etching Equipment for Semiconductor Market Size Overview by Type (2021-2032)
- 1.4.2 Global Dry Etching Equipment for Semiconductor Historic Market Size Review by Type (2021-2026)
- 1.4.3 Global Dry Etching Equipment for Semiconductor Forecasted Market Size by Type (2027-2032)
- 1.5 Key Regions Market Size by Type
- 1.5.1 North America Dry Etching Equipment for Semiconductor Sales Breakdown by Type (2021-2026)
- 1.5.2 Europe Dry Etching Equipment for Semiconductor Sales Breakdown by Type (2021-2026)
- 1.5.3 Asia-Pacific Dry Etching Equipment for Semiconductor Sales Breakdown by Type (2021-2026)
- 1.5.4 South America Dry Etching Equipment for Semiconductor Sales Breakdown by Type (2021-2026)
- 1.5.5 Middle East and Africa Dry Etching Equipment for Semiconductor Sales Breakdown by Type (2021-2026)
2 Global Market Dynamics
- 2.1 Dry Etching Equipment for Semiconductor Industry Trends
- 2.2 Dry Etching Equipment for Semiconductor Industry Drivers
- 2.3 Dry Etching Equipment for Semiconductor Industry Opportunities and Challenges
- 2.4 Dry Etching Equipment for Semiconductor Industry Restraints
3 Market Competitive Landscape by Company
- 3.1 Global Top Players by Dry Etching Equipment for Semiconductor Revenue (2021-2026)
- 3.2 Global Top Players by Dry Etching Equipment for Semiconductor Sales (2021-2026)
- 3.3 Global Top Players by Dry Etching Equipment for Semiconductor Price (2021-2026)
- 3.4 Global Dry Etching Equipment for Semiconductor Industry Company Ranking, 2024 VS 2025 VS 2026
- 3.5 Global Dry Etching Equipment for Semiconductor Major Company Production Sites & Headquarters
- 3.6 Global Dry Etching Equipment for Semiconductor Company, Product Type & Application
- 3.7 Global Dry Etching Equipment for Semiconductor Company Establishment Date
- 3.8 Market Competitive Analysis
- 3.8.1 Global Dry Etching Equipment for Semiconductor Market CR5 and HHI
- 3.8.2 Global Top 5 and 10 Dry Etching Equipment for Semiconductor Players Market Share by Revenue in 2025
- 3.8.3 2025 Dry Etching Equipment for Semiconductor Tier 1, Tier 2, and Tier 3
4 Dry Etching Equipment for Semiconductor Regional Status and Outlook
- 4.1 Global Dry Etching Equipment for Semiconductor Market Size and CAGR by Region: 2021 VS 2025 VS 2032
- 4.2 Global Dry Etching Equipment for Semiconductor Historic Market Size by Region
- 4.2.1 Global Dry Etching Equipment for Semiconductor Sales in Volume by Region (2021-2026)
- 4.2.2 Global Dry Etching Equipment for Semiconductor Sales in Value by Region (2021-2026)
- 4.2.3 Global Dry Etching Equipment for Semiconductor Sales (Volume & Value), Price and Gross Margin (2021-2026)
- 4.3 Global Dry Etching Equipment for Semiconductor Forecasted Market Size by Region
- 4.3.1 Global Dry Etching Equipment for Semiconductor Sales in Volume by Region (2027-2032)
- 4.3.2 Global Dry Etching Equipment for Semiconductor Sales in Value by Region (2027-2032)
- 4.3.3 Global Dry Etching Equipment for Semiconductor Sales (Volume & Value), Price and Gross Margin (2027-2032)
5 Dry Etching Equipment for Semiconductor by Application
- 5.1 Dry Etching Equipment for Semiconductor Market by Application
- 5.1.1 Logic and Memory
- 5.1.2 Power Device
- 5.1.3 MEMS
- 5.1.4 Others
- 5.2 Global Dry Etching Equipment for Semiconductor Market Size by Application
- 5.2.1 Global Dry Etching Equipment for Semiconductor Market Size Overview by Application (2021-2032)
- 5.2.2 Global Dry Etching Equipment for Semiconductor Historic Market Size Review by Application (2021-2026)
- 5.2.3 Global Dry Etching Equipment for Semiconductor Forecasted Market Size by Application (2027-2032)
- 5.3 Key Regions Market Size by Application
- 5.3.1 North America Dry Etching Equipment for Semiconductor Sales Breakdown by Application (2021-2026)
- 5.3.2 Europe Dry Etching Equipment for Semiconductor Sales Breakdown by Application (2021-2026)
- 5.3.3 Asia-Pacific Dry Etching Equipment for Semiconductor Sales Breakdown by Application (2021-2026)
- 5.3.4 South America Dry Etching Equipment for Semiconductor Sales Breakdown by Application (2021-2026)
- 5.3.5 Middle East and Africa Dry Etching Equipment for Semiconductor Sales Breakdown by Application (2021-2026)
6 Company Profiles
- 6.1 Lam Research
- 6.1.1 Lam Research Company Information
- 6.1.2 Lam Research Business Overview
- 6.1.3 Lam Research Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.1.4 Lam Research Dry Etching Equipment for Semiconductor Product Portfolio
- 6.1.5 Lam Research Recent Developments
- 6.2 Tokyo Electron Limited
- 6.2.1 Tokyo Electron Limited Company Information
- 6.2.2 Tokyo Electron Limited Business Overview
- 6.2.3 Tokyo Electron Limited Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.2.4 Tokyo Electron Limited Dry Etching Equipment for Semiconductor Product Portfolio
- 6.2.5 Tokyo Electron Limited Recent Developments
- 6.3 Applied Materials
- 6.3.1 Applied Materials Company Information
- 6.3.2 Applied Materials Business Overview
- 6.3.3 Applied Materials Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.3.4 Applied Materials Dry Etching Equipment for Semiconductor Product Portfolio
- 6.3.5 Applied Materials Recent Developments
- 6.4 Hitachi High-Tech
- 6.4.1 Hitachi High-Tech Company Information
- 6.4.2 Hitachi High-Tech Business Overview
- 6.4.3 Hitachi High-Tech Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.4.4 Hitachi High-Tech Dry Etching Equipment for Semiconductor Product Portfolio
- 6.4.5 Hitachi High-Tech Recent Developments
- 6.5 SEMES
- 6.5.1 SEMES Company Information
- 6.5.2 SEMES Business Overview
- 6.5.3 SEMES Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.5.4 SEMES Dry Etching Equipment for Semiconductor Product Portfolio
- 6.5.5 SEMES Recent Developments
- 6.6 AMEC
- 6.6.1 AMEC Company Information
- 6.6.2 AMEC Business Overview
- 6.6.3 AMEC Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.6.4 AMEC Dry Etching Equipment for Semiconductor Product Portfolio
- 6.6.5 AMEC Recent Developments
- 6.7 NAURA
- 6.7.1 NAURA Company Information
- 6.7.2 NAURA Business Overview
- 6.7.3 NAURA Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.7.4 NAURA Dry Etching Equipment for Semiconductor Product Portfolio
- 6.7.5 NAURA Recent Developments
- 6.8 SPTS Technologies (KLA)
- 6.8.1 SPTS Technologies (KLA) Company Information
- 6.8.2 SPTS Technologies (KLA) Business Overview
- 6.8.3 SPTS Technologies (KLA) Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.8.4 SPTS Technologies (KLA) Dry Etching Equipment for Semiconductor Product Portfolio
- 6.8.5 SPTS Technologies (KLA) Recent Developments
- 6.9 Oxford Instruments
- 6.9.1 Oxford Instruments Company Information
- 6.9.2 Oxford Instruments Business Overview
- 6.9.3 Oxford Instruments Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.9.4 Oxford Instruments Dry Etching Equipment for Semiconductor Product Portfolio
- 6.9.5 Oxford Instruments Recent Developments
- 6.10 ULVAC
- 6.10.1 ULVAC Company Information
- 6.10.2 ULVAC Business Overview
- 6.10.3 ULVAC Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.10.4 ULVAC Dry Etching Equipment for Semiconductor Product Portfolio
- 6.10.5 ULVAC Recent Developments
- 6.11 Plasma-Therm
- 6.11.1 Plasma-Therm Company Information
- 6.11.2 Plasma-Therm Business Overview
- 6.11.3 Plasma-Therm Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.11.4 Plasma-Therm Dry Etching Equipment for Semiconductor Product Portfolio
- 6.11.5 Plasma-Therm Recent Developments
- 6.12 GigaLane
- 6.12.1 GigaLane Company Information
- 6.12.2 GigaLane Business Overview
- 6.12.3 GigaLane Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.12.4 GigaLane Dry Etching Equipment for Semiconductor Product Portfolio
- 6.12.5 GigaLane Recent Developments
- 6.13 VM
- 6.13.1 VM Company Information
- 6.13.2 VM Business Overview
- 6.13.3 VM Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.13.4 VM Dry Etching Equipment for Semiconductor Product Portfolio
- 6.13.5 VM Recent Developments
- 6.14 Jusung Engineering
- 6.14.1 Jusung Engineering Company Information
- 6.14.2 Jusung Engineering Business Overview
- 6.14.3 Jusung Engineering Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.14.4 Jusung Engineering Dry Etching Equipment for Semiconductor Product Portfolio
- 6.14.5 Jusung Engineering Recent Developments
- 6.15 SAMCO
- 6.15.1 SAMCO Company Information
- 6.15.2 SAMCO Business Overview
- 6.15.3 SAMCO Dry Etching Equipment for Semiconductor Sales, Revenue and Gross Margin (2021-2026)
- 6.15.4 SAMCO Dry Etching Equipment for Semiconductor Product Portfolio
- 6.15.5 SAMCO Recent Developments
7 North America by Country
- 7.1 North America Dry Etching Equipment for Semiconductor Sales by Country
- 7.1.1 North America Dry Etching Equipment for Semiconductor Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 7.1.2 North America Dry Etching Equipment for Semiconductor Sales by Country (2021-2026)
- 7.1.3 North America Dry Etching Equipment for Semiconductor Sales Forecast by Country (2027-2032)
- 7.2 North America Dry Etching Equipment for Semiconductor Market Size by Country
- 7.2.1 North America Dry Etching Equipment for Semiconductor Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 7.2.2 North America Dry Etching Equipment for Semiconductor Market Size by Country (2021-2026)
- 7.2.3 North America Dry Etching Equipment for Semiconductor Market Size Forecast by Country (2027-2032)
8 Europe by Country
- 8.1 Europe Dry Etching Equipment for Semiconductor Sales by Country
- 8.1.1 Europe Dry Etching Equipment for Semiconductor Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 8.1.2 Europe Dry Etching Equipment for Semiconductor Sales by Country (2021-2026)
- 8.1.3 Europe Dry Etching Equipment for Semiconductor Sales Forecast by Country (2027-2032)
- 8.2 Europe Dry Etching Equipment for Semiconductor Market Size by Country
- 8.2.1 Europe Dry Etching Equipment for Semiconductor Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 8.2.2 Europe Dry Etching Equipment for Semiconductor Market Size by Country (2021-2026)
- 8.2.3 Europe Dry Etching Equipment for Semiconductor Market Size Forecast by Country (2027-2032)
9 Asia-Pacific by Country
- 9.1 Asia-Pacific Dry Etching Equipment for Semiconductor Sales by Country
- 9.1.1 Asia-Pacific Dry Etching Equipment for Semiconductor Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 9.1.2 Asia-Pacific Dry Etching Equipment for Semiconductor Sales by Country (2021-2026)
- 9.1.3 Asia-Pacific Dry Etching Equipment for Semiconductor Sales Forecast by Country (2027-2032)
- 9.2 Asia-Pacific Dry Etching Equipment for Semiconductor Market Size by Country
- 9.2.1 Asia-Pacific Dry Etching Equipment for Semiconductor Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 9.2.2 Asia-Pacific Dry Etching Equipment for Semiconductor Market Size by Country (2021-2026)
- 9.2.3 Asia-Pacific Dry Etching Equipment for Semiconductor Market Size Forecast by Country (2027-2032)
10 South America by Country
- 10.1 South America Dry Etching Equipment for Semiconductor Sales by Country
- 10.1.1 South America Dry Etching Equipment for Semiconductor Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 10.1.2 South America Dry Etching Equipment for Semiconductor Sales by Country (2021-2026)
- 10.1.3 South America Dry Etching Equipment for Semiconductor Sales Forecast by Country (2027-2032)
- 10.2 South America Dry Etching Equipment for Semiconductor Market Size by Country
- 10.2.1 South America Dry Etching Equipment for Semiconductor Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 10.2.2 South America Dry Etching Equipment for Semiconductor Market Size by Country (2021-2026)
- 10.2.3 South America Dry Etching Equipment for Semiconductor Market Size Forecast by Country (2027-2032)
11 Middle East and Africa by Country
- 11.1 Middle East and Africa Dry Etching Equipment for Semiconductor Sales by Country
- 11.1.1 Middle East and Africa Dry Etching Equipment for Semiconductor Sales Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 11.1.2 Middle East and Africa Dry Etching Equipment for Semiconductor Sales by Country (2021-2026)
- 11.1.3 Middle East and Africa Dry Etching Equipment for Semiconductor Sales Forecast by Country (2027-2032)
- 11.2 Middle East and Africa Dry Etching Equipment for Semiconductor Market Size by Country
- 11.2.1 Middle East and Africa Dry Etching Equipment for Semiconductor Market Size Growth Rate (CAGR) by Country: 2021 VS 2025 VS 2032
- 11.2.2 Middle East and Africa Dry Etching Equipment for Semiconductor Market Size by Country (2021-2026)
- 11.2.3 Middle East and Africa Dry Etching Equipment for Semiconductor Market Size Forecast by Country (2027-2032)
12 Value Chain and Sales Channels Analysis
- 12.1 Dry Etching Equipment for Semiconductor Value Chain Analysis
- 12.1.1 Dry Etching Equipment for Semiconductor Key Raw Materials
- 12.1.2 Key Raw Materials Price
- 12.1.3 Raw Materials Key Suppliers
- 12.1.4 Manufacturing Cost Structure
- 12.1.5 Dry Etching Equipment for Semiconductor Production Mode & Process
- 12.2 Dry Etching Equipment for Semiconductor Sales Channels Analysis
- 12.2.1 Direct Comparison with Distribution Share
- 12.2.2 Dry Etching Equipment for Semiconductor Distributors
- 12.2.3 Dry Etching Equipment for Semiconductor Customers
13 Concluding Insights
14 Appendix
- 14.1 Reasons for Doing This Study
- 14.2 Research Methodology
- 14.3 Research Process
- 14.4 Authors List of This Report
- 14.5 Data Source
- 14.5.1 Secondary Sources
- 14.5.2 Primary Sources
- 14.6 Disclaimer
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