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Machinery & Equipment

Turbomolecular Pump

A turbomolecular pump generates high vacuum by transferring momentum to gas molecules through alternating rotor and stator blade stages, with a backing pump handling the exhaust.

Types
Magnetic Bearing Type · Hybrid Bearing Type · Ball Bearing Type
Applications
Semiconductor · Display · Photovoltaics

5 editions6 September 2026

View 5 research editions

Electronics & Semiconductor

High Purity Turbomolecular Pumps

Turbomolecular pumps transfer momentum from rapidly rotating blades to gas molecules to generate high vacuum in processes with stringent contamination-control requirements.

Types
Water-cooled · Air-cooled
Applications
Lithography · CVD & PVD · Wafer Dry Etching

5 editions3 May 2026

View 5 research editions
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