Machinery & Equipment
Magnetic Polishing Machines
- Types
- Desktop · Floor Standing
- Applications
- Aerospace · Medical · Others
5 editions13 April 2026
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Aluminum Nitride Ceramic Heater is a wafer heater used in processing chambers which is utilizing the high thermal conductivity and plasma resistance of aluminum nitride. Aluminum nitride, AlN, is a light grey or white ceramic material synthesized from the abundant elements aluminum and nitrogen which has a density of 3.26g/cm3. High thermal conductivity makes AlN an excellent choice where fast response or high levels of uniform temperatures are required.
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