Electronics & Semiconductor
Electrostatic Chucks for Wafer
The Electrostatic Chucks (ESC) is a tool that clamps an object with the force generated between the electrode and the object by applying a voltage to the electrode. There are two different types of electrostatic clamping methods. One is Coulomb force type that utilizes an insulator as a dielectric material, and the other is Johnson-Rahbek force type that utilizes an attractive force induced by dielectric polarization caused by minute electric current flow across the boundary…
- Types
- Coulomb Type Electrostatic Chucks · Johnsen-Rahbek (JR) Type Electrostatic Chucks
- Applications
- 300 mm Wafer · 200 mm Wafer · 150 mm Wafer
5 editions22 December 2025
$4,950Single user · USD · Market Analysis & ForecastExplore product: Electrostatic Chucks for WaferCompare research options for Electrostatic Chucks for Wafer