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Silicon Carbide Fluidized-Bed Reactor Liner (SiC FBR Liner) is a high-purity cylindrical ceramic lining installed inside a fluidized-bed reactor, principally to form the reaction chamber used for the chemical-vapor-deposition production of granular polysilicon. Its inward-facing surface is directly exposed to fluidizing gases, silicon-containing precursor gases, elevated temperatures and pressures, and continuously circulating seed and product particles. Typically constructed as a monolithic or segmented assembly of silicon carbide components, the liner isolates the process material from the outer reactor structure, minimizes metallic and carbon contamination, and provides resistance to thermal loading, chemical attack, particle erosion, and silicon deposition. Owing to progressive wear and fouling under operating conditions, the SiC FBR liner is generally designed as a replaceable reactor component.
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